Adsorption device for reducing content of boron and phosphorus impurities in chlorosilane
A technology of impurity content and adsorption equipment, applied in the directions of halosilane, selective adsorption, silicon compounds, etc., can solve the problems of low efficiency and waste of adsorbent use, and achieve the effect of improving treatment efficiency and optimizing use efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0027] Such as Figure 1 to Figure 4 As shown, the adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilanes provided in Example 1 includes heat exchangers 1, adsorption columns and buffer tanks 3 connected in series along the traveling direction of chlorosilanes. The adsorption column is mainly composed of a cylinder body 201 and a plurality of adsorption units coaxially placed in the inner cavity of the cylinder body 201 sequentially along the direction from top to bottom. Sliding vertically, any adsorption unit includes an inner ring 203 and an outer ring 202 that are sheathed together on a coaxial line. There is a gap between the inner ring 203 and the outer ring 202, and the two ends of the gap are formed by filter The net 205 is closed to form a storage space 204. The storage space 204 is filled with boron-phosphorus adsorbent, and the storage spaces 204 of two adjacent adsorption units communicate with each other; Seat 206 is clo...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More - R&D
- Intellectual Property
- Life Sciences
- Materials
- Tech Scout
- Unparalleled Data Quality
- Higher Quality Content
- 60% Fewer Hallucinations
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com



