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Adsorption device for reducing content of boron and phosphorus impurities in chlorosilane

A technology of impurity content and adsorption equipment, applied in the directions of halosilane, selective adsorption, silicon compounds, etc., can solve the problems of low efficiency and waste of adsorbent use, and achieve the effect of improving treatment efficiency and optimizing use efficiency

Inactive Publication Date: 2020-02-04
新疆东方希望新能源有限公司
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Problems solved by technology

The publication date is July 6, 2016, and the Chinese invention patent document with the application number CN201610112604.4 discloses a method and equipment for removing boron and phosphorus by chlorosilane fixed bed chemical adsorption reaction method, which mainly utilizes the adsorption The boron and phosphorus impurities in the chlorosilane are removed by the agent, and in this technical scheme, because the fixed bed adopts the traditional structure, the amount of the adsorbent cannot be adjusted according to the flow rate of the chlorosilane, and the adsorbent is used somewhat. Waste, and after it has been used for a period of time, it must be shut down to wait for the adsorbent to be activated before it can continue to be used, and the processing efficiency is low

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  • Adsorption device for reducing content of boron and phosphorus impurities in chlorosilane
  • Adsorption device for reducing content of boron and phosphorus impurities in chlorosilane
  • Adsorption device for reducing content of boron and phosphorus impurities in chlorosilane

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Embodiment 1

[0027] Such as Figure 1 to Figure 4 As shown, the adsorption equipment for reducing the content of boron and phosphorus impurities in chlorosilanes provided in Example 1 includes heat exchangers 1, adsorption columns and buffer tanks 3 connected in series along the traveling direction of chlorosilanes. The adsorption column is mainly composed of a cylinder body 201 and a plurality of adsorption units coaxially placed in the inner cavity of the cylinder body 201 sequentially along the direction from top to bottom. Sliding vertically, any adsorption unit includes an inner ring 203 and an outer ring 202 that are sheathed together on a coaxial line. There is a gap between the inner ring 203 and the outer ring 202, and the two ends of the gap are formed by filter The net 205 is closed to form a storage space 204. The storage space 204 is filled with boron-phosphorus adsorbent, and the storage spaces 204 of two adjacent adsorption units communicate with each other; Seat 206 is clo...

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Abstract

The invention discloses an adsorption device for reducing the content of boron and phosphorus impurities in chlorosilane, and belongs to the technical field of polycrystalline silicon manufacturing. Aplurality of adsorption units are arranged to form an adsorption column, so that implementation personnel can adjust the number of the adsorption units in the cylinder body of the adsorption column according to the flow of chlorosilane in order to optimize the use efficiency of an adsorbent.

Description

technical field [0001] The invention relates to the technical field of polysilicon manufacturing, in particular to an adsorption device for reducing the content of boron and phosphorus impurities in chlorosilane. Background technique [0002] With the increasing global demand for clean energy, the utilization rate of solar energy resources is gradually increasing. Polysilicon is used as the key raw material of solar panels, and its purity directly affects the conversion efficiency and life of solar panels. At present, the main impurities in polysilicon production are: B, P, C, O, Fe, Ni, Cu, Zn, Al, Ga, Cr, etc. Among them, the removal of boron and phosphorus impurities is relatively difficult and costly. How to remove boron and phosphorus impurities in polysilicon has become an urgent technical problem to be solved. The publication date is July 6, 2016, and the Chinese invention patent document with the application number CN201610112604.4 discloses a method and equipment...

Claims

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Application Information

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IPC IPC(8): B01D15/08C01B33/107
CPCB01D15/08C01B33/10784
Inventor 易军唐东昌简凤宁赵小飞
Owner 新疆东方希望新能源有限公司
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