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Device for preparing uniform metallic particles through differential pressure control + electromagnetic disturbance

A technology of electromagnetic disturbance and metal particles is applied in the field of devices for preparing uniform metal particles, which can solve the problems of low frequency of microdroplet preparation, and achieve the effects of simple and easy equipment, good controllability, and easy large-scale production.

Active Publication Date: 2020-02-28
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The drop-on-demand technology is to apply a periodic pulse driving force above the nozzle to realize a pulse force to generate a metal particle droplet on demand. This method has the advantages of controllable frequency and size of solder balls, but the micro Drop preparation frequency is low

Method used

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  • Device for preparing uniform metallic particles through differential pressure control + electromagnetic disturbance
  • Device for preparing uniform metallic particles through differential pressure control + electromagnetic disturbance

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Experimental program
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Embodiment 1

[0026] see figure 1 and figure 2 , the embodiment of the present invention is provided with a signal generator 1, a power amplifier 2, an electromagnetic force generator 3, a melting chamber 4, a constant magnetic field 5, a connecting hole 6, an injection chamber 7, a melting heating coil 8, a stainless steel plate 9 with a nozzle, Stainless steel electrode 10, first miniature electric valve 11, first nitrogen tank 12, first pressure regulator tank 13, first precision gas regulator valve 14, temperature control and air control device 15, gas valve switch 16, high temperature peanut oil pipe 17, into Ball heating coil 18, low temperature peanut oil pipe 19, observation window 20, particle collection switch 21, particle collection container 22, second precision gas pressure regulator valve 23, oxygen content tester 24, spherical tank 25, second pressure regulator tank 26 , the second miniature electric valve 27, the vacuum pump 28, the second nitrogen tank 29.

[0027] The t...

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Abstract

The present invention relates to a test device for preparing uniform metallic particles through differential pressure control + electromagnetic disturbance, and relates to a micro-spray device in a jet flow mode. This device provides high-frequency and high-quality preparation for mini-solder balls (such as tin and tin alloy) and other metal particles. The technical solution is that the device includes an electromagnetic force generator, a pressure controlled system, a temperature control system, and a ball forming system. The method belongs to a non-contact direct-drive continuous-jet uniformmetallic particle preparation technology. The high-frequency and high-quality preparation of uniform metal particles is achieved by uniformly matching pressure difference parameters and pulse electromagnetic disturbance parameters (current frequency, current waveform, current amplitude, and magnetic field strength), and thus the method is simple and easy to achieve.

Description

technical field [0001] The invention relates to a device for high-quality preparation of uniform metal particles (such as tin and its alloys) based on pressure difference regulation + electromagnetic disturbance high-frequency, which belongs to a non-contact direct-drive continuous spray uniform metal particle preparation technology realization device, suitable for High-frequency and high-quality preparation of metal particles or metal droplets. Background technique [0002] Microelectronic device packaging and semiconductor chip fabrication are two important parts of microelectronics engineering. Large-scale integrated circuit packages are welded with uniform metal particles (micro-solder balls) to achieve signal transmission and mechanical connections between core-core and core-board. Continuous injection technology and drop-on-demand technology are two commonly used methods for the preparation of uniform metal particles. The continuous injection technology is based on t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F9/08
CPCB22F9/082B22F2009/0848B22F2009/0892B22F2009/0836
Inventor 雷永平王同举林健李康立袁涛符寒光
Owner BEIJING UNIV OF TECH