Ring piece angle detection tool and detection method and application using same

Abstract

The invention provides a ring piece angle detection tool. According to the detection tool, axial grooves are formed in a detection sleeve with the inner ring surface in the radial direction; the axialgrooves are used for detecting the angle of a protruding block on a ring piece to be detected, the protruding block of the ring piece to be detected can be directly placed in the axial grooves, and ring piece angle detection can be achieved through one-man operation; meanwhile the detection tool is simple in structure and easy to machine. When the detection tool is used for testing the angle of the ring piece, the operation is convenient, the problem that the ring piece is easy to fall off or scratch in an original ring piece angle testing method is solved, and the detection tool can be wellapplied to the field of semiconductors or machining.

Description

technical field [0001] The invention relates to the technical field of component processing, in particular to the technical field of semiconductor component processing, in particular to a ring angle inspection tool and its inspection method and application. Background technique [0002] In the production process of semiconductor chips, whether it is an 8-inch production line or a 12-inch production line in target sputtering, rings are used, and rings also participate in sputtering. After the ring is installed on the sputtering machine, it is energized by current to generate a magnetic field around it, so that the atoms on the sputtering target can be evenly attached to the wafer through the magnetic field. The ring is installed on the machine, and the opening position When energized, other areas must not be in contact with the machine, and there must be no conduction. [0003] However, in the existing semiconductor manufacturing process, the angles of the protrusions around...

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Problems solved by technology

[0003] However, in the existing semiconductor manufacturing process, the angles of the bumps around the ring body are prone to shift after the ring is manufactured, resulting in electric leakage when the ring touches the cavity of the abutment.

[0004] Therefore, it is necessary to strictly control the angles of the bumps around the ring. For this reason, the angle of the ring needs to be checked to ensure that the angle of the ring structure is accurate, but there is a gap on the ring, and the ring has certain elasticity, as disclosed in CN108396297A Sputtering machine rings, which caused great difficulties in the detection process

[0005] CN109900191A discloses a sputtering machine ring hole detection tool and method. The tool uses a checker with an insertion hole and a pin to check whether the hole angle of the ring is accurate. The method requires the cooperation of two people In order to realize the inspection of the hole position of the ring, the pins need to be inserted one by one during the inspection, and the pins need to be removed one by one after the inspection. The operation is cumbersome and there is a risk of the ring falling

[0006] CN207093165U discloses a VVT driver timing point angle checker of an engine, the checker adopts the structure of positioning pin holes to check the angle of the driver, but the structure is complicated and cannot be applied to the angle check of the ring structure

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