Semiconductor type gas sensor, multiple sensing device and recognition method of multiple sensing device

Abstract

The invention relates to a semiconductor type gas sensor, a multiple sensing device and a recognition method of the multiple sensing device. The semiconductor-type gas sensor includes a substrate, electrodes, a gas detection film, and a heater; the electrodes are formed on the upper surface of the substrate in the form of a predetermined pattern; the gas detection film has a predetermined thickness and coves the external exposed surfaces of the electrodes; the heater is closely attached onto the lower surface of the substrate and heats the gas detection film with a predetermined temperature; and the gas detection film is a mixture obtained by mixing a predetermined amount of thermosetting resin and a silane coupling agent as a binder into a SnO2-containing detection substance on which an amorphous layer is formed. According to the semiconductor type gas sensor, heating temperature for operating the semiconductor type gas sensor is significantly reduced, so that power consumed for operation and maintenance costs can be decreased; manufacturing costs can be decreased; measurement sensitivity can be improved; measurement variability due to changes in ambient temperature and humidity can be reduced; and gas can be accurately detected.

Description

technical field [0001] The invention relates to a semiconductor type gas sensor, a multiple sensing device and an identification method thereof. Specifically, in this semiconductor-type gas sensor, by significantly reducing the heating temperature for operating the semiconductor-type gas sensor, the operation power consumption and maintenance costs of the gas sensor can be saved, and the production cost can be reduced. While improving the measurement sensitivity, Gas can be accurately detected by reducing measurement variability caused by changes in temperature and humidity around the gas sensor. Background technique [0002] With the rapid development of modern society and the automobile industry, the problem of air pollution caused by toxic gases such as carbon monoxide, carbon dioxide, hydrogen sulfide and nitrogen dioxide has become increasingly prominent, and the risk of gas explosion or gas poisoning is increasing. Currently, research on gas sensors capable of measuri...

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Problems solved by technology

[0006] As mentioned above, in the existing semiconductor type gas sensor, in order to activate the gas detection film, it is necessary to heat the heater at a minimum temperature of 300°C or higher and keep the activation temperature, so it is impossible to use epoxy resin, etc. General PCB substrates mainly use expensive heat-resistant substrates such as ceramic substrates, resulting in increased production costs and power consumption

In order to improve the sensitivity to the surrounding gas leakage, the existing gas-sensitive film needs to add catalysts such as Pt, and because the gas detection degree changes with the temperature and humidity around the gas-sensitive film, it is difficult to accurately detect the gas

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