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A cleaning method for laser perforated aluminum nitride ceramic plate

A technology of aluminum nitride ceramics and laser drilling, which is applied in the directions of cleaning methods using liquids, chemical instruments and methods, cleaning methods and utensils, etc. Difficult to clean and other problems to achieve the effect of reducing damage, better control of production process and improving cleaning efficiency

Active Publication Date: 2021-07-16
GUANGDONG GASTIGHT HERMETICAL COMPONENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] After aluminum nitride ceramics are laser drilled, the slag produced by high-temperature melting will stick to the surface of the ceramic and the micropores. These slags have a certain thickness and hardness and are difficult to clean
At present, the method of first scraping off the slag on the surface with a scraper, and then cleaning the slag in the micropores with alkali is easy to cause scratches on the surface of aluminum nitride ceramics, the edge of the micropores is broken, and the cleaning time is long and the production efficiency is low. The inner wall of the micropores is not easy to clean, and the alkali cleaning concentration is too high and the time is too long, which will cause corrosion on the surface of aluminum nitride ceramics, and the production process is not easy to control

Method used

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Examples

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Comparison scheme
Effect test

Embodiment 1

[0037] A piece of aluminum nitride ceramic plate with a size of 114.3 mm in length, 114.3 mm in width and 0.5 mm in thickness was drilled with a laser drilling machine into 2400 micro-holes with a diameter of 0.1 mm on the ceramic plate. The cleaning method of slag on the ceramic plate includes the following steps: 1. Pre-soaking. Soak the laser-drilled aluminum nitride ceramic plate in sulfuric acid with a volume ratio of 30% for 2 hours. 2. Scrubbing: gently wipe off the surface of the ceramic plate with a cloth soaked in pure water. 3. For the first ultrasonic cleaning, place the ceramic plate in absolute ethanol or isopropanol for 5 minutes. 4. Soak the aluminum nitride ceramic plate in volume ratio In 10% sulfuric acid, soak for 4 hours. 5. For the second ultrasonic cleaning, place the ceramic plate in absolute ethanol or isopropanol for 5 minutes. 6. Natron, soak the ceramic plate in 5% by weight In sodium hydroxide solution, soak for 2 hours. 7. For the third ultrasonic...

Embodiment 2

[0039] A piece of aluminum nitride ceramic plate with a size of 50.8 mm in length, 50.8 mm in width, and 0.2 mm in thickness is drilled with a laser drilling machine into 1600 micro-holes with a diameter of 0.05 mm on the ceramic plate. The cleaning method of slag on the ceramic plate includes the following steps: 1. Pre-soaking. Soak the laser-drilled aluminum nitride ceramic plate in sulfuric acid with a volume ratio of 20% for 2 hours. 2. Scrubbing: gently wipe off the surface of the ceramic plate with a cloth soaked in pure water. 3. For the first ultrasonic cleaning, put the ceramic plate in absolute ethanol or isopropanol and ultrasonically clean it for 3 minutes. 4. Soak the aluminum nitride ceramic plate in volume ratio In 5% sulfuric acid, soak for 2 hours. 5. For the second ultrasonic cleaning, place the ceramic plate in absolute ethanol or isopropanol for 3 minutes. 6. Natron, soak the ceramic plate in 2% by weight In sodium hydroxide solution, soak for 1 hour. 7. F...

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Abstract

The invention discloses a method for cleaning a laser perforated aluminum nitride ceramic plate. The perforated aluminum nitride ceramic plate is first soaked in acid, and the oxides in the molten slag react with the acid to bond the aluminum nitride ceramic plate. The slag is hollow and soft, and the slag on the surface of the ceramic plate can be removed by gently wiping with a cloth to reduce the damage to the ceramic plate caused by the scraper; multiple ultrasonic cleaning in the middle can make large pieces of soft slag fall off, which is convenient for acid and Inner layer slag reaction, adding block cleaning process to improve cleaning efficiency; short-term soaking with low-concentration alkali, the alkali reacts slightly with the surface of the aluminum nitride ceramic sheet, and the slag in the micropores can be completely cleaned to avoid alkali If the cleaning concentration is too high and the time is too long, it will cause corrosion pits and excessive roughness on the surface of aluminum nitride ceramics, so as to ensure that there is no residue of slag in the micropores; all ultrasonic cleaning is to put the aluminum nitride ceramic plate into absolute ethanol or Ultrasonic in isopropanol, the aluminum nitride plate has no reaction with absolute ethanol and isopropanol, and the production process is better controlled.

Description

technical field [0001] The invention relates to the technical field of cleaning ceramic plates, in particular to a cleaning method for laser perforated aluminum nitride ceramic plates. Background technique [0002] After aluminum nitride ceramics are laser drilled, the slag produced by high-temperature melting will bond on the surface of the ceramic and in the micropores. These slags have a certain thickness and hardness and are difficult to clean. At present, the method of first scraping off the slag on the surface with a scraper, and then cleaning the slag in the micropores with alkali is easy to cause scratches on the surface of aluminum nitride ceramics, the edge of the micropores is broken, and the cleaning time is long and the production efficiency is low. The inner wall of the micropores is not easy to clean, and the alkali washing concentration is too high and the time is too long, which will cause corrosion on the surface of aluminum nitride ceramics, and the produc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/08B08B3/12B08B3/02B08B13/00F26B21/14C23G1/12C23G1/22
CPCB08B3/02B08B3/08B08B3/12B08B13/00C23G1/125C23G1/22F26B21/14
Inventor 徐雅琼温梦帆
Owner GUANGDONG GASTIGHT HERMETICAL COMPONENT
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