Remote group control system for semiconductor device
A device group, semiconductor technology, applied in transmission systems, digital transmission systems, electrical components, etc., can solve problems such as reduced work efficiency and increased workload of engineers, to improve efficiency, achieve fine-grained monitoring, and achieve real-time and The effect of synchronicity
Inactive Publication Date: 2020-03-27
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
In order to improve the production efficiency of the manufacturing plant, semiconductor companies continue to increase the number of machines. With the gradual increase in the number of semiconductor equipment, if the data information of the semiconductor equipment is still managed centrally by engineers operating in front of the semiconductor equipment, the workload of the engineer will be increased. The sharp increase and the work efficiency are also greatly reduced. Therefore, it is not very realistic to always require engineers to operate in front of the machine. Therefore, a corresponding remote control system is urgently needed to facilitate the staff of the manufacturing plant to carry out semiconductor processing outside the plant. Equipment monitoring and data analysis, etc.
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[0039] The present application is described in detail below, and examples of embodiments of the present application are shown in the drawings, wherein the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. Also, detailed descriptions of known technologies will be omitted if they are not necessary to illustrate the features of the present application. The embodiments described below by referring to the figures are exemplary only for explaining the present application, and are not construed as limiting the present application.
[0040] Those skilled in the art can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meanings as commonly understood by those of ordinary skill in the art to which this application belongs. It should also be understood that terms, such as those defined in commonly used dictionaries, should be ...
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The invention provides a remote group control system of a semiconductor device. The group control system comprises a server and at least one client. The client is in communication connection with theserver through a first preset protocol, the server is in communication connection with at least one semiconductor device group through a second preset protocol, and the semiconductor device group comprises at least one semiconductor device. The server is used for obtaining the operation state parameters of each semiconductor device in the semiconductor device group and sending the operation stateparameters to the client. The client is used for displaying running state parameters. The remote group control system can independently realize the monitoring and management functions of the semiconductor equipment based on the architecture of the semiconductor equipment group, improves the production efficiency of a semiconductor manufacturing factory, improves the production line balance and timely delivery capability of the semiconductor manufacturing factory, and reduces the production cost of the semiconductor manufacturing factory.
Description
technical field [0001] The present invention relates to the technical field of semiconductors, in particular to a remote group control system for semiconductor equipment. Background technique [0002] In semiconductor manufacturing plants, the seamless integration between production planning and scheduling, manufacturing execution, and material control is usually achieved through centralized management of the overall process, materials, and menus of semiconductor equipment. [0003] At present, the overall process, materials, and menus (which may be called data information) of semiconductor equipment are generally managed in a centralized manner by engineers operating in front of the semiconductor equipment. In order to improve the production efficiency of the manufacturing plant, semiconductor companies continue to increase the number of machines. With the gradual increase in the number of semiconductor equipment, if the data information of the semiconductor equipment is st...
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IPC IPC(8): H04L29/08H04L29/06H04L12/24
CPCH04L41/0631H04L41/069H04L63/10H04L67/025H04L67/125
Inventor 黄扬君周法福
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD