Trichlorosilane production process and trichlorosilane production system
A trichlorosilane and production system technology, applied in the direction of silicon compounds, halosilanes, halide silicon compounds, etc., can solve the problems of large particle size of silicon powder raw materials, increased process instability, and small production capacity of trichlorosilane , to achieve the effects of reducing the operating load, improving the utilization rate of raw materials, and reducing the amount of slag waste treatment
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[0028] Such as figure 1 As shown, a trichlorosilane production system includes a silicon powder receiving tank 1, a reactor 2, a washing tower 4 and a crude distillation tower 5; the silicon powder receiving tank 1 is connected with the reactor 2 to provide silicon powder raw material for the reactor 2 In the reactor 2, four cyclone separators 12 are set near the outlet of the top at the same level, after the outlets of the cyclone separators 12 are merged respectively in pairs, and then uniformly merged to discharge from the reactor outlet, the outlet of the reactor 2 top and the washing The tower 4 is connected, and the inlet of the hydrogen / silicon tetrachloride mixed gas 7 is set at the bottom of the reactor; the side of the washing tower 4 is provided with a liquid outlet and mixed with the silicon powder raw material in a mixer 13 before the washing tower inlet through the washing tower circulation pump 3 After feeding, the bottom of the washing tower 4 is provided with ...
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