Durable chip type oxygen sensor
Oxygen sensor, chip-type technology, applied in the field of durable chip-type oxygen sensor, can solve the problems of increased preparation difficulty and complex process conditions, and achieve the effects of improving production pass rate, improving flatness, and avoiding warping
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Embodiment 1
[0029] Example 1: A durable chip oxygen sensor, including a heater layer 1, a reference air channel layer 2, a solid electrolyte layer 3, a diffusion channel layer 4 and a sensitive electrode pin layer that are sequentially sintered from top to bottom 5. The solid electrolyte layer 3 is located in the middle layer, and the heater layer 1, the reference air channel layer 2, the diffusion channel layer 4 and the sensitive electrode pin layer 5 are symmetrically distributed with respect to the solid electrolyte layer 3;
[0030] The upper and lower sides of the solid electrolyte layer 3 are respectively provided with an outer electrode 19 and an inner electrode 18, the outer electrode 19 is connected to the outer electrode via hole 13 through the outer electrode lead 14, and the inner electrode 18 is connected through the inner electrode lead 12. connected to the inner electrode via 11, the inner electrode via 11 and the outer electrode via 13 are distributed on the end of the sol...
Embodiment 2
[0034] Example 2: A durable chip oxygen sensor, comprising a heater layer 1, a reference air channel layer 2, a solid electrolyte layer 3, a diffusion channel layer 4 and a sensitive electrode pin layer sequentially sintered from top to bottom 5. The solid electrolyte layer 3 is located in the middle layer, and the heater layer 1, the reference air channel layer 2, the diffusion channel layer 4 and the sensitive electrode pin layer 5 are symmetrically distributed with respect to the solid electrolyte layer 3;
[0035] The upper and lower sides of the solid electrolyte layer 3 are respectively provided with an outer electrode 19 and an inner electrode 18, the outer electrode 19 is connected to the outer electrode via hole 13 through the outer electrode lead 14, and the inner electrode 18 is connected through the inner electrode lead 12. connected to the inner electrode via 11, the inner electrode via 11 and the outer electrode via 13 are distributed on the end of the solid elect...
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