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High-density metal target material preparation process

A metal target material and preparation process technology, which is applied in the direction of metal material coating process, fusion spraying, coating, etc., can solve the problems of high material loss, uneven grain, high cost, etc., and achieve high energy, high density, The effect of low scrap rate

Inactive Publication Date: 2020-04-14
SOLERAS ADVANCED COATINGS (JIANGYIN) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, the preparation process of low-melting-point metal targets is mostly a casting process, which has defects such as uneven grains and internal bubbles, and has a lot of material loss and high cost; for this reason, a new high-density metal target is urgently needed Preparation Process

Method used

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  • High-density metal target material preparation process

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Embodiment Construction

[0021] The present invention relates to a high-density metal target preparation process. The process is as follows: after the target 1 is placed on the target drive assembly, the spraying sealing cabin 101 is first vacuumed so that a sealed chamber with a pressure of 2Pa is formed in the cabin. Vacuum environment; then, the target drive assembly starts, drives the target to rotate and translate left and right, at the same time, the spray gun of the plasma spray gun system 201 starts spraying and sprays the target 1; and in the process of spraying, the infrared temperature sensor 106 monitors the surface temperature of the target 1 in real time. When the temperature deviates from the set point, the power of the plasma spray gun system 201 and its wire feeding speed are adjusted accordingly, so that the surface of the target 1 is always kept in a slightly fused state and the internal friction is reduced. Void, enhance density.

[0022] At the same time, when spraying, the dust s...

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Abstract

The invention relates to a high-density metal target material preparation process, which comprises the steps that a target material (1) is placed on a target material driving assembly, then a sprayingsealed cabin (101) is vacuumized to form a sealed vacuum environment with a pressure of 2Pa in the cabin; then the target material driving assembly is started to drive the target material to horizontally move left and right while rotating, and meanwhile, a spray gun of a plasma spray gun system (201) starts to spray the target material (1); and in the spraying process, an infrared temperature sensor (106) monitors the surface temperature of the target material (1) in real time, and when the temperature deviates from a set point, the power of the plasma spray gun system (201) and the wire supply speed of the plasma spray gun system (201) are adjusted accordingly, so that the surface of the target material (1) is kept in a micro-melting state all the time. According to the high-density metal target material preparation process, spraying can be carried out in a vacuum environment, so that the spraying quality of the target material is guaranteed.

Description

technical field [0001] The invention relates to a target preparation process, in particular to a preparation process for spraying in a closed low-pressure atmosphere. Background technique [0002] At present, the preparation process of low-melting-point metal targets is mostly a casting process, which has defects such as uneven grains and internal bubbles, and has a lot of material loss and high cost; for this reason, a new high-density metal target is urgently needed Preparation Process. Contents of the invention [0003] The purpose of the present invention is to overcome the above disadvantages and provide a high-density metal target preparation process, which can be sprayed in a closed low-pressure environment, thereby saving materials and ensuring the spraying quality of the target. [0004] The purpose of the present invention is achieved like this: [0005] A high-density metal target preparation process, the process is: after placing the target on the target driv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C4/134C23C4/06
CPCC23C4/06C23C4/134
Inventor 蔺裕平韩刚库
Owner SOLERAS ADVANCED COATINGS (JIANGYIN) CO LTD
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