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Pressure sensor unit and pressure sensor

A pressure sensor, flexible conductive technology, applied in the field of flexible equipment, can solve the problems of non-conforming pressure sensor, difficult pressure sensor unit, low sensitivity resolution, etc., to improve sensitivity and resolution, uniform deformation, and increase detection range. Effect

Active Publication Date: 2020-04-17
INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the hard back plate 91 is not easily deformed, and the conductive film 92 is brittle, it is difficult for the pressure sensor unit to achieve uniform deformation with the change of the applied pressure, so that the intrinsic repeatability of the existing pressure sensor unit (that is, for the same The pressure sensor performs multiple measurements, the coincidence degree of the pressure-resistance curve), linearity (that is, the deviation between the sensor input-output curve and the selected fitting straight line), sensitivity (that is, the selection of the pressure sensor pressure-resistance curve The slope is the sensitivity of the pressure sensor) and the resolution (ie the minimum detection limit) is low, which does not meet the needs of the development of the pressure sensor

Method used

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  • Pressure sensor unit and pressure sensor
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  • Pressure sensor unit and pressure sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] A polydimethylsiloxane film with a semicircular microstructure is used as the microstructure layer 10, wherein the semicircular microstructure has a radius of 250 microns and a uniform spacing of 500 microns. A highly flexible conductive film with pressure sensitive properties is used as the flexible conductive film layer 20, wherein the flexible conductive film layer 20 is a composite of styrene-butadiene block copolymer and multi-walled carbon nanotubes. The interdigital electrode layer 30 is an interdigital circuit prepared on a flexible circuit board. Use high-strength glue to bond and package the three along the outer non-working area. After the packaging is completed, use a constant loading pressure testing machine for calibration, and the calibration results are as follows Figure 4 ( Figure 4 The middle abscissa is the pressure applied to the pressure sensor unit, and the ordinate is the resistance measured by the pressure sensor unit under this pressure, the...

Embodiment 2

[0036]An Eco-flex film with a semicircular microstructure is used as the microstructure layer 10, wherein the radius of the semicircular microstructure is 100 microns, and the uniform spacing is 250 microns. A highly flexible conductive film with pressure sensitive properties is used as the flexible conductive film layer 20, and the flexible conductive film layer 20 is a composite of thermoplastic polyurethane and multi-walled carbon nanotubes. The interdigital electrode layer 30 is an interdigital circuit prepared on a flexible circuit board. Use high-strength glue to bond and package the three along the outer non-working area. After the packaging is completed, use a constant loading pressure testing machine for calibration, and the calibration results are as follows Figure 5 ; It has very good linearity, sensitivity, resolution and intrinsic repeatability relative to commercial pressure sensors.

Embodiment 3

[0038] A thermoplastic polyurethane film with a prism-shaped microstructure is used as the microstructure layer 10, wherein the side length of the prism-shaped microstructure is 500 microns, the depth is 250 microns, and the uniform spacing is 500 microns. A highly flexible conductive film with pressure sensitive properties is used as the flexible conductive film layer 20, and the flexible conductive film layer 20 is a composite of polydimethylsiloxane and activated carbon. The interdigital electrode layer 30 is an interdigital circuit prepared on a flexible circuit board. Use high-strength glue to bond and package the three along the outer non-working area. After the packaging is completed, use a constant loading pressure testing machine for calibration, and the calibration results are as follows Figure 6 ; It has very good linearity, sensitivity, resolution and intrinsic repeatability relative to commercial pressure sensors.

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Abstract

A pressure sensor unit and a pressure sensor are provided. The pressure sensor unit comprises a microstructure layer, a flexible conductive film layer and an interdigital electrode layer which are sequentially arranged, and a plurality of convex-concave microstructures are formed on the surface of the side, facing the flexible conductive film layer, of the structure layer. The pressure sensor unithas high intrinsic repeatability, sensitivity and resolution.

Description

technical field [0001] The invention relates to the technical field of flexible equipment, in particular to a pressure sensor unit and a pressure sensor. Background technique [0002] The commercial three-layer flexible pressure sensor has the characteristics of simple manufacture, low cost and strong designability due to the characteristics of separate manufacturing and reassembly. figure 1 Shown is a structural schematic diagram of a pressure sensor unit in the prior art, figure 2 shown as figure 1 The pressure-resistance relationship diagram of the multiple detection results of the pressure sensor unit shown. Such as figure 1 and figure 2 As shown, the pressure sensor unit in the prior art generally includes a hard backboard 91 for protection, a conductive film 92 and an interdigital electrode 93, and the conductive film 92 is arranged between the hard backboard 91 and the interdigital electrode 93 . Since the hard back plate 91 is not easily deformed, and the con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20G01L9/02
CPCG01L1/20G01L9/02
Inventor 冯雪傅棋琪陈颖
Owner INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG
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