Force/torque adjustable sensor and manufacturing method

Abstract

The invention provides a force / torque adjustable sensor and a manufacturing method. The force / torque adjustable sensor comprises a mobile platform, a sensor bottom board (1), a cross-shaped double-cantilever unit, a sensor active regulation and control beam (2), a sensor passive regulation and control beam (3), a sensor front board (4), a sensor input board (5) and a sensor output board (6), wherein the sensor bottom board (1) fixes the sensor on the mobile platform, and the sensor bottom board (1) is grounded at the same time; the cross-shaped double-cantilever unit comprises the sensor active regulation and control beam (2) and the sensor passive regulation and control beam (3); the sensor active regulation and control beam (2) and the sensor passive regulation and control beam (3) are arranged in a crossed mode; capacitance change information can be generated by capacitance change of the output board; and the capacitance change information is matched with force / torque value measurement result information. According to the invention, a system fine adjustment function is achieved, and position errors and long-term measurement loss caused by sensor processing can be compensated.

Description

technical field [0001] The invention relates to the field of force and torque sensors, in particular to an adjustable force / torque sensor and a manufacturing method, in particular to a system-adjustable micro force-torque sensor. Background technique [0002] Many breakthroughs have been made in the research of milligram-level micro-robots at home and abroad, especially the flapping-wing micro-aircraft. The milligram-level flapping-wing micro-aircraft has achieved the take-off against gravity, which can produce the control effect of small torque. In addition to tiny lift and moment, these aircraft also have the characteristics of small weight, high system operating frequency, and high degree of non-linear motion. The inability to accurately collect the lift and control torque data of the aircraft in real time is becoming a limitation for the further development of micro-bionic flapping-wing aircraft systems. One of the bottlenecks of optimization and precise control, so hig...

AI Technical Summary

Problems solved by technology

This invention can meet the measurement of micro-force, but cannot meet the measurement requirements of micro-torque. For micro-robots, it is very important to be able to measure force and torque at the same time. The data obtained by this measurement function is important for system optimization and precise control. Guidance parameters

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