Humidity sensor chip

Abstract

The invention discloses a humidity sensor chip. The sensor chip comprises a humidity sensitive module, a measuring circuit module, an MCU and a storage module. Two different physical properties of thehumidity-sensitive material change along with the change of the moisture content of the humidity-sensitive material. The measuring circuit module measures two different physical properties of the humidity sensitive material at the same time, and transmits a measurement result to the MCU; a standard parameter library is stored in the storage module, and standard curves of two different physical properties of the humidity-sensitive material changing along with the change of the moisture content of the humidity-sensitive material are recorded in the standard parameter library; the MCU performs indexing, comparison and operation on the standard curves recorded in the standard parameter library according to results obtained through measurement to obtain an ambient air humidity reference valuea and an ambient air humidity reference value b to be measured respectively; the root mean square values or average values of the a and b are output as a result.

Description

technical field [0001] The invention relates to a humidity sensor chip. Background technique [0002] Due to different application fields, the technical requirements for humidity sensors are also different. From a manufacturing point of view, the same humidity sensor has different materials, structures, and processes. Its performance and technical indicators (such as accuracy) are very different, so the prices are also very different. When detecting the humidity of the environment, the humidity-sensitive material has to be exposed to the environment to be tested for a long time, and it is easy to be polluted, which will affect its measurement accuracy and long-term stability. In actual use, due to the influence of dust, oil and harmful gases, aging will occur and the accuracy will decrease after a long time of use. The accuracy level of the humidity sensor should be judged in combination with its long-term stability. Generally speaking, long-term stability and use The life...

AI Technical Summary

Problems solved by technology

When detecting the ambient humidity, the humidity-sensitive material has to be exposed to the environment to be tested for a long time, and it is easy to be polluted, which will affect its measurement accuracy and long-term stability.

In actual use, due to the influence of dust, oil and harmful gases, aging will occur and the accuracy will decrease after a long time of use. The accuracy level of the humidity sensor should be judged in combination with its long-term stability. Generally speaking, long-term stability and use The lifespan is the first issue affecting the quality of the humidity sensor. There are very few products whose annual drift is controlled at the 1% RH level, generally around ±2%, or even higher

Images