Laser beam splitting device and laser welding method

Abstract

The invention discloses a laser beam splitting device and a laser welding method. The laser beam splitting device comprises a laser generator, a collimator, a beam splitter, and a focusing lens, wherein the laser generator is used for emitting a first laser beam, the collimator is used for collimating the first laser beam to form a parallel second laser beam, the beam splitter is used for splitting the second laser beam to form a plurality of laser beam bodies, the focusing lens is used for focusing the plurality of laser beam bodies so as to correspondingly form a plurality of focusing pointsfor welding, the collimator is located between the laser generator and one side of the beam splitter, and the focusing lens is located outside the other side of the beam splitter and is aligned withthe beam splitter. According to the laser beam splitting device and the laser welding method, one laser beam is split into multiple laser beam bodies for welding n so that the semiconductor welding time can be greatly saved, the welding efficiency is improved, the labor cost is reduced, and the laser welding effect is favorably improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor laser welding, in particular to a laser beam splitting device and a laser welding method. Background technique [0002] With the development of modern technology, semiconductor devices have been widely used in all walks of life, people have put forward higher and higher requirements for the reliability of semiconductor devices, and the welding of semiconductor devices has also attracted more and more attention. , Because the welding failure of semiconductors is often fatal and irreversible, it will cause certain economic losses. At present, there are many kinds of welding methods for semiconductor components, but the laser welding method is mainly used. Laser welding has the advantages of large depth and small deformation. It can be welded at room temperature or under special conditions. By controlling the pulse width, energy and power of the laser pulse and wavelength and other parameters,...

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Problems solved by technology

[0003] But the laser welding technology at this stage also has certain defects, because the essence of laser welding is to use a high-energy-density laser beam as a heat source. The energy after the initial laser beam is focused is relatively large, which will cause uneven welds and poor welding formation. defect

More importantly, because laser welding technology has been widely used in the field of precision welding of micro and small parts, in order to improve reliability and stability, these micro and small parts and some precision devices usually have many parts that need to be welded To ensure a better connection, the laser welding technology at this stage needs to weld the next welding point after one welding point. The number of welding parts directly determines the length of the processing cycle. Welding technology, time-consuming, complicated operation, low efficiency, will cause a lot of labor cost, time cost loss

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