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Time shaping system with debugging compensation function

A technology of time and function, applied in laser parts, electrical components, lasers, etc., can solve the problems of practical application difficulties in the field of time shaping, failure of time shaping, and difficulty in installation and adjustment of time shapers. The effect of low precision and low processing requirements

Active Publication Date: 2020-05-08
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In order to solve the technical problem that the existing femtosecond laser pulse time shaper based on Michelson interferometer is difficult to install and adjust, and it is very easy to cause time shaping failure, which makes its practical application in the field of time shaping very difficult. Time Shaping System for Compensation Function

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  • Time shaping system with debugging compensation function
  • Time shaping system with debugging compensation function

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Embodiment Construction

[0033] The present invention will be further described below in conjunction with accompanying drawing.

[0034] Such as figure 2 As shown, the time shaping system of the embodiment of the present invention is based on the principle of Michelson interferometer, and includes a beam splitting mirror 201 (which is coated with a semi-transparent and semi-reflective film), and light beams are sequentially arranged on the reflected light path of the beam splitting mirror 201. Wedge 204, the first polarizer 206, the first analyzer 207 and the first reflector 202, the second polarizer 208, the second analyzer 209, and the flat plate are sequentially arranged on the transmitted light path of the beam splitting and combining mirror 201 205 and the second mirror 203.

[0035] Considering that the surface processing error of the optical element and the installation and adjustment error of the optical path will cause the sub-pulse 1 and the sub-pulse 2 to be non-parallel after combining, ...

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Abstract

In order to solve the technical problems that an existing femtosecond laser pulse time shaper based on a Michelson interferometer is difficult to install and adjust, time shaping failure is extremelylikely to happen, and consequently practical application of the femtosecond laser pulse time shaper in the field of time shaping is very difficult, the invention provides a time shaping system with adebugging compensation function. The system comprises a light splitting and beam combining mirror. Incident laser is divided into two paths after passing through the light splitting and beam combiningmirror, wherein an optical wedge and a first reflecting mirror are sequentially arranged on one path of sub-pulse light path, and a flat plate and a second reflecting mirror are sequentially arrangedon the other path of sub-pulse light path; the wedge angle alpha of the optical wedge is equal to arcsin (n2sin theta / n1), wherein n1 and n2 are the air refractive index and the refractive index of the optical wedge respectively, and theta is the inclination angle offset of the light beam; the included angle between the flat plate and the optical axis is adjustable; the first mirror and the second mirror are translatable along respective optical axes.

Description

technical field [0001] The invention relates to the technical field of femtosecond laser pulse shaping, in particular to a time shaping system with a debugging compensation function. Background technique [0002] In industries as diverse as silicon processing, integrated circuit (IC) back-end processing, microelectronics packaging, and solar manufacturing, processing of brittle materials faces serious challenges as wafer thicknesses continue to shrink, and the accuracy of their fabrication (reticle Width), quality (edge ​​collapse, roughness, etc.) have put forward higher requirements, which gave birth to the femtosecond laser pulse shaping technology. Time shaping is to shape a laser pulse into several sub-pulses, and the time delay between sub-pulses, the number of sub-pulses, and the energy of sub-pulses can be shaped according to actual needs. The time-shaped femtosecond laser pulse can more flexibly and profoundly affect the process of material phase transition, so it ...

Claims

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Application Information

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IPC IPC(8): H01S3/00H01S3/108
CPCH01S3/0057H01S3/108
Inventor 李珣李明刘红军谭羽
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI