Cascade Utilization System and Control Method of Liquid Nitrogen Cooling Capacity
A control method, liquid nitrogen technology, applied in the direction of container discharge method, separation method, air conditioning system, etc., can solve the problem of wasting cooling capacity, and achieve the effects of reducing power consumption, reducing waste, reducing temperature and humidity
Inactive Publication Date: 2020-09-15
CHINA ACADEMY OF SPACE TECHNOLOGY
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Problems solved by technology
[0006] In order to solve the above-mentioned problems in the prior art, that is, to solve the problem of wasting cooling capacity in the liquid nitrogen gasification process, the present disclosure provides a cascade utilization system of liquid nitrogen cooling capacity, the cascade utilization system includes:
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[0041] It should be understood by those skilled in the art that the embodiment described below is only a preferred embodiment of the present disclosure, and does not mean that the technical solution to be protected in this disclosure can only be realized through this embodiment. This preferred embodiment is intended to be used It is used to explain the technical principles of the present disclosure, but not to limit the protection scope of the present disclosure. Based on the preferred embodiments provided in the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts should still fall within the protection scope of the present disclosure.
[0042] It should be noted that in the description of the present disclosure, the terms "center", "upper", "lower", "top", "bottom", "left", "right", "vertical", "horizontal", " Terms indicating directions or positional relationships such as "inner", "outer", etc. are based ...
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The disclosure provides a cascaded utilization system of liquid nitrogen cooling capacity, including a parallel liquid nitrogen gasification system, a steam turbine power generation system and an air dehumidification system. Among them, the liquid nitrogen gasification system includes a series-connected primary heat exchanger and secondary heat exchanger; the steam turbine power generation system includes a sequentially connected primary heat exchanger, steam turbine, circulation pump and evaporator; the air dehumidification system includes a parallel The drying air path and the regeneration air path, the drying air path includes the secondary heat exchanger, the rotary dehumidifier, the air compressor and the high-temperature heat exchanger in series, and the regeneration air path includes the high-temperature heat exchanger, the first fan and the high-temperature heat exchanger in series. Rotary dehumidifier. The above-mentioned cascaded utilization system of the present disclosure can enable the steam turbine power generation system and the air dehumidification system to absorb and utilize the cooling capacity generated during the gasification of liquid nitrogen in the liquid nitrogen gasification system, and can perform cascaded utilization of the cooling capacity generated by the liquid nitrogen gasification system, effectively reducing The waste of cooling capacity in the liquid nitrogen gasification process is eliminated.
Description
technical field [0001] The disclosure belongs to the technical field of energy-saving equipment, and specifically provides a cascaded utilization system of cooling capacity of liquid nitrogen and a control method thereof. Background technique [0002] Nitrogen and dry air are usually used in electronic clean rooms. Among them, nitrogen can be used as carrier gas for liquid diffusion sources, dilution gas for gas diffusion sources, and protective gas for devices in high-temperature diffusion furnaces. In order to facilitate the transportation and storage of nitrogen, nitrogen is usually stored in liquid nitrogen tanks in the form of liquid nitrogen (temperature is about -190°C). When in use, the liquid nitrogen tank is first transported to the gas station in the factory area, and then the liquid nitrogen is passed into the vaporizer to absorb the heat in the environment and then becomes a gaseous state for use in various processes in the electronic clean workshop. Since the...
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IPC IPC(8): F24F3/14F24F11/64F24F11/65F24F11/84F17C7/04F01D15/10F01D17/10B01D53/26
CPCB01D53/265B01D2257/80F01D15/10F01D17/10F17C7/04F24F3/14F24F11/64F24F11/65F24F11/84
Inventor 刘媛陈帅赵建国宋璞胡柳竹杨红军
Owner CHINA ACADEMY OF SPACE TECHNOLOGY