Method for thinning solid-body layers provided with components
A solid layer, solid technology, used in electrical components, welding equipment, semiconductor devices, etc., can solve the problems of no longer force transmission, poor polymer adhesion, etc., to avoid material loss.
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[0162] Figure 1a The provision of solid 1 (especially wafer) is shown.
[0163] according to Figure 1b , The provided solid 1 is coupled or bonded or welded or screwed or clamped on a tool carrier (chuck) 3, wherein the tool carrier preferably includes a cooling function and thus preferably becomes a cooling device 3. The solid 1 is preferably fastened to the cooling device 3 in the longitudinal direction with its lower side (which is preferably opposite the surface 5 in the longitudinal direction), in particular bonded. Therefore, in order to produce the modified body 9, the laser beam is introduced into the solid 1 via the surface 5 in the direction of the cooling device 3, which surface is an integral part of the solid layer to be separated. In addition, it is particularly preferred that the surface 5 is subjected to a high-temperature treatment, in particular the epitaxial material is arranged on the solid surface 5, thereby preferably obtaining an additional layer 145 or a ...
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