Laser pulse energy measuring device, system and method

Abstract

The invention discloses a laser pulse energy measuring device, system and method. The laser pulse energy measuring device includes: a first optical path assembly, a second optical path assembly and a third optical path assembly, and the second optical path assembly and the first optical path assembly constitute the first optical path assembly A measuring optical path, the third optical path component and the first optical path component constitute the second measuring optical path. Wherein, the first optical path assembly includes: a first beam splitter and a second beam splitter arranged sequentially along the first measurement optical path or the second measurement optical path; wherein, the first beam splitter and the second beam splitter form an orthogonal structure . In the present invention, through the orthogonal design of the measuring optical path of the laser energy measuring device, in the process of measuring the laser pulse energy, the influence of the parameter change of the laser beam on the measurement result is reduced, and the high-precision measurement of the laser pulse energy measurement is realized. At the same time, the energy measurement closed-loop feedback of the laser is realized, which ensures the stability of the energy output of the laser.

Description

technical field [0001] The invention relates to the technical field of laser pulse energy measurement, in particular to a laser pulse energy measurement device, system and method. Background technique [0002] Laser is an important light source in modern industry, and can be used in lighting, laser processing, projection display, optical communication, material analysis, test and measurement, semiconductor processing and other fields. In practical applications, whether it is a continuous laser or a pulsed laser, the laser is required to have a stable energy output. Therefore, the laser generally includes a laser pulse energy measurement device inside the laser to achieve closed-loop control of the laser beam energy output by the laser. [0003] In the prior art, laser energy measurement usually includes a thermopile method and a photodiode method. For example, a thermopile sensor is used to convert the light radiation of the laser into heat, and the energy of the incident l...

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Problems solved by technology

[0006] In order to solve the problem of laser pulse energy measurement and its closed-loop feedback process, it is necessary to set up a beam splitting structure to irradiate part of the laser beam to the energy detector, and the beam splitting structure is easily affected by the parameters of the laser beam (such as polarization, beam quality and beam pointing). properties, etc.), it is impossible to achieve high-precision measurement of laser pulse energy, which affects the technical problems of the stability of laser energy output. The invention provides a laser pulse energy measurement device, system and method

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