Photoacoustic spectrometry detection chip sensor and manufacturing method

Abstract

The invention discloses a photoacoustic spectrometry detection chip sensor and a manufacturing method thereof. The sensor includes: a vibration transduction structure, an optical waveguide and a phaseshift waveguide grating. The optical waveguide is arranged on the vibration transduction structure. The optical waveguide is a three-layer waveguide layer and comprises a substrate, a light guide layer and a cladding layer. The vibration transduction structure is used as the substrate of the optical waveguide, the light guide layer of the optical waveguide is rare earth doped silicon dioxide, thecladding layer of the optical waveguide is silicon dioxide, and the phase shift waveguide grating is etched in the light guide layer of the optical waveguide. The method comprises the following steps: generating an optical waveguide on a vibration transduction structure by adopting a mocvd process; etching a phase shift waveguide grating on the light guide layer of the optical waveguide by adopting a UV photoetching technology. Integration of the sensor and the transduction structure is achieved, the structure is simple and firm, manufacturing is easy, integration with other systems is facilitated, and the integration problem of a traditional optical fiber distributed sensing system can be effectively solved.

Description

technical field [0001] The invention belongs to the field of optical devices and relates to the field of photoacoustic spectrum detection, in particular to a photoacoustic spectrum detection chip sensor and a manufacturing method. Background technique [0002] With the rapid development of science and technology, photoacoustic spectroscopy detection technology has more and more application requirements in biomedicine, industrial production and other fields, especially for gas detection, photoacoustic spectroscopy technology can realize the detection of various toxic and harmful gases Concentration detection. With the continuous improvement of industrial production and environmental monitoring technology, people have higher and higher requirements for the integration and structural performance of photoacoustic spectroscopy gas sensors. In some special application fields, there are not only specific requirements for the sensitivity and precision of the sensor, but also high r...

AI Technical Summary

Problems solved by technology

[0004] In view of the above problems, the present invention provides a photoacoustic spectrum detection chip sensor based on a planar wa

Images