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Single-class and multi-class tiny object suspension directional movement and self-loading huge transfer method

A technology of directional movement and transfer method, which is applied in the directions of microstructure devices, processing microstructure devices, assembling microstructure devices, etc., which can solve the problems of low transfer efficiency, poor positioning accuracy, and poor operability

Active Publication Date: 2020-07-17
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004]The purpose of the present invention is to overcome the problems of low transfer efficiency, low reliability, poor positioning accuracy and poor operability in the existing mass transfer method of tiny objects. Provide a single type of micro-object suspension directional movement and self-loading mass transfer method

Method used

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  • Single-class and multi-class tiny object suspension directional movement and self-loading huge transfer method
  • Single-class and multi-class tiny object suspension directional movement and self-loading huge transfer method
  • Single-class and multi-class tiny object suspension directional movement and self-loading huge transfer method

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no. 1 example

[0048] Figure 1 to Figure 2 Shown is the first embodiment of the method for floating directional movement of a single type of small objects and autonomously mounted massive transfer of the present invention. The method of suspending and directional movement of a single class of small objects and autonomously mounted massive transfer includes the following steps:

[0049] S1. After surface treatment of the small objects 3 to be transferred, they are put into solution A with surfactant and viscosity modifier. The surface of the small objects 3 does not infiltrate with the solution A, and the density of the solution A is lower than that of the small objects 3;

[0050] S2. Perform patterning treatment and surface treatment on the target carrier 1 so that a patterned groove 2 is generated at the target position, and the surface of the patterned groove 2 does not infiltrate the solution A but wets the surface of the small object 3, and the target carrier The surface of the board 1 exc...

no. 2 example

[0060] This embodiment is an embodiment of the method of floating and directional movement of multiple types of small objects and autonomously mounted mass transfer methods. The difference from the first embodiment is that in this embodiment, three different shapes of small objects are realized on a target carrier. The method of suspending and directional movement of objects and autonomous transfer of massive amounts. The numbers of the three types of small objects with different shapes and sizes are the first small object 7, the second small object 8, and the third small object 9, respectively.

[0061] The patterned grooves of three shapes and sizes are produced on the target carrier by etching, which are the first patterned groove 4, the second patterned groove 5 and the third patterned groove 6, respectively. The surfaces of the groove 4, the second patterned groove 5, and the third patterned groove 6 and the first small object 7, the second small object 8 and the third small...

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Abstract

The invention provides a single-class or multi-class tiny object suspension directional movement and self-loading huge transfer method. By performing surface treatment on a tiny object and a target carrier plate, the target position of the target carrier plate has different surface energy. By putting the tiny object and the target carrier plate into the solution, dissolving or introducing gas intothe solution, and separating out the bubble wrapped tiny object, the bubble wrapped tiny object suspends and rises to get close to the target carrier plate. By utilizing the difference of the surfaceenergy at the target position of the target carrier plate, the bubble and the chip are captured and stand at the target position, and then by the degassing processing, the bubble is dissolved, and the tiny object is combined with the target position of the target carrier plate. By carrying out differentiated surface treatment on different target positions of the target carrier plate, the suspension directional movement and self-loading huge transfer of multiple types of tiny objects can be further realized in different solutions in sequence. The single-class or multi-class tiny object suspension directional movement and self-loading huge transfer method provided by the present invention has the advantages of high efficiency, high positioning precision and easiness in operation.

Description

Technical field [0001] The invention relates to the technical field of the movement of small objects, and more specifically, to a method for suspending and directional movement of single and multiple types of small objects and autonomous mass transfer. Background technique [0002] Directional movement is an important means of material processing and material separation, and has a wide range of applications in materials, biology, electronics and other fields. The massive transfer of tiny objects has important application value in the fields of microchips, biology, and materials such as tiny objects. At present, the main mass transfer technology is divided into several categories: 1) Fine Pick / Place precise grasping, mainly a) Electrostatic force: the transfer head with a bipolar structure is used, and positive and negative voltages are applied during the transfer process. , When picking a tiny object from the substrate, apply positive electricity to a silicon electrode, and the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/68B81C3/00
CPCH01L21/67144H01L21/68B81C3/001B81C2203/055
Inventor 杨冠南林伟崔成强张昱
Owner GUANGDONG UNIV OF TECH
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