Microscopic laser Raman spectrometer and working method thereof

Abstract

The invention discloses a microscopic laser Raman spectrometer and a working method thereof. The microscopic laser Raman spectrometer comprises a visible light path structure, a laser path structure and a sample signal light path structure, wherein the visible light path structure comprises a visible light source, a first semi-reflecting semi-transmitting lens, a second semi-reflecting semi-transmitting lens, a first reflecting mirror, a microscope objective, a first focusing lens, an optical lens and an imaging camera, the microscope objective is located below the first reflecting mirror, thelaser light path structure comprises a laser and a Raman light filter, the sample signal light path structure comprises a signal detector and a focusing lens group, and the visible light path structure, the laser light path structure and the sample signal light path structure share the first semi-reflecting semi-transmitting lens. The microscopic laser Raman spectrometer adopts fiber-free coupling, so signal loss can be effectively reduced, and sensitivity can be improved.

Description

technical field [0001] The invention belongs to the technical field of Raman spectrometers, and in particular relates to a microscopic laser Raman spectrometer and a working method thereof. Background technique [0002] Microlaser Raman spectrometer is a comprehensive measurement system that integrates laser spectroscopy, precision machinery and microelectronic systems. The final result is to obtain the spectrogram of the frequency distribution of the scattered light intensity with a certain polarization state of the scattering medium in a certain direction. [0003] Microlaser Raman spectrometer analysis is a non-destructive micro-area analysis method. Liquid, powder and various solid samples can be used for the determination of Raman spectroscopy without special treatment. Raman spectroscopy can be used alone or in combination with other techniques (such as X-ray diffraction spectroscopy, infrared absorption spectroscopy, neutron scattering, etc.) to conveniently determin...

AI Technical Summary

Problems solved by technology

[0004] At present, domestic micro-laser Raman spectrometers based on small fiber optic spectrometers usually use fiber-optic coupling to collect optical signals. The laser light source is introduced into the microscope objective through an optical fiber, and then the Raman spectrum signal of the sample is collected through the micro-object. Through the Raman spectrum and then coupled to the fiber optic spectrometer with an optical fiber, this process uses a commercial low-cost fiber coupler (generally SMA950), and every time the optical signal enters and exits the optical fiber, it will lose more than 50%.

The Raman scattering signal is only equivalent to one millionth of the Rayleigh scattering signal, and the signal for the microscopic optical path is even weaker, resulting in low sensitivity of the Raman spectrometer

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