Simple and efficient alignment method for dicing saw with plurality of cutting channels

Abstract

The invention discloses a simple and efficient alignment method for a dicing saw with a plurality of cutting channels. The method comprises the following automatic alignment control steps: S10), determining teaching template records in advance according to the cutting channel requirements of a machined object and are stored in an image acquisition module, and the teaching template records comprisestarting point coordinate characteristic records of all cutting channels in the machined object; S20) identifying a target starting point coordinate of a certain cutting channel of the processed object through an image acquisition module, and automatically calculating target starting point coordinates of other cutting channels of the processed object according to the teaching template record; andS30) completing the automatic alignment of the processed object. According to the invention, the teaching template record is preset, and the teaching template record quickly corresponds to the processed object in the subsequent scribing process, so that the automatic alignment time of the processed object can be remarkably saved, the method is particularly suitable for quick alignment of batch polygonal processed objects, the alignment precision is high, and the cutting quality of the scribing machine is effectively improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor cutting and processing, in particular to a simple and efficient alignment method for a dicing machine with multiple cutting channels. Background technique [0002] The dicing machine is an indispensable equipment for the post-processing process in the production of semiconductor device integrated circuits. Its main function is to cut the semiconductor chip into individual chip components. In order to avoid the deviation found by the dicing machine during the cutting process , the prior art usually uses a manual straightening machine for alignment adjustment. However, with the current popularization of intelligent manufacturing in the domestic industry, the traditional manual straightening machine has its own defects such as low efficiency and low output ratio. Compared with the popularization of intelligent manufacturing, manual straightening technology has become less and less competitive i...

AI Technical Summary

Problems solved by technology

However, with the current popularization of intelligent manufacturing in the domestic industry, the traditional manual straightening machine has its own defects such as low efficiency and low output ratio. Compared with the popularization of intelligent manufacturing, manual straightening technology has become less and less competitive in the market force

Although some current automatic alignment technologies through the image acquisition module need to be aligned according to the preset cutting target pattern each time, this is suitable for the cutting process of a single cutting channel, but it is applied to the fast cutting process with multiple cutting channels. When dicing and cutting are required, each cutting channel needs to be re-identified and aligned, and the efficiency of automatic alignment is relatively backward

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