Surface-coated cutting tool and method for producing same
A technology of cutting tools and surface coating, which is applied in the field of surface coating cutting tools and its manufacturing, and can solve problems such as shortened lifespan
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[0151] [Samples 1 to 23]
[0152] (1) Cleaning of the substrate
[0153] Figure 4 is a schematic cross-sectional view of the cathodic arc ion plating device used in this embodiment, and Figure 5 for Figure 4 Schematic top view of the device shown.
[0154] exist Figure 4 and 5 In the shown device, a cathode 106 for the first unit layer, a cathode 107 for the second unit layer and a cathode 120 for the front surface layer are arranged in the chamber 101, which are provided as cladding a target made of an alloy of a metal source; and a rotary-type substrate holder 104 for placing the substrate 2 . An arc power source 108 is connected to the cathode 106 and an arc power source 109 is connected to the cathode 107 . A bias power supply 110 is connected to the substrate holder 104 . In addition, the chamber 101 is provided with an inlet port for introducing a gas 105 therein and an exhaust port 103 for adjusting the pressure inside the chamber 101, and the gas...
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Abstract
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