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Multi-mode cooperative control method and system for resonant micro-gyroscope and resonant micro-gyroscope

A collaborative control, multi-modal technology, applied in measurement devices, instruments, steering sensing equipment, etc., can solve the problem of low mechanical sensitivity of gyroscopes, and achieve the effect of reducing quality factor, improving overall performance, and fast switching.

Active Publication Date: 2020-08-14
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The invention provides a multi-mode cooperative control method and system of a resonant micro-gyroscope and a resonant micro-gyroscope, which are used to overcome the defects in the prior art that the quality factor of the gyroscope cannot be adjusted and the mechanical sensitivity of the gyroscope is not high. The quality factor is adjusted to adjust the quality factor of the finished gyroscope to improve the mechanical sensitivity of the gyroscope

Method used

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  • Multi-mode cooperative control method and system for resonant micro-gyroscope and resonant micro-gyroscope
  • Multi-mode cooperative control method and system for resonant micro-gyroscope and resonant micro-gyroscope
  • Multi-mode cooperative control method and system for resonant micro-gyroscope and resonant micro-gyroscope

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Embodiment 1

[0052] Such as Figure 6 As shown, a multimodal cooperative control method for driving modalities and detecting modal quality factors includes the following steps:

[0053] Step S1, generating drive control parameters and detection control parameters according to the initial parameters; generating drive control signals and detection control signals respectively in response to the drive control parameters and detection control parameters;

[0054] Step S2, the drive control signal is modulated and applied to the drive electrodes of the gyroscope, and the drive electrodes send an excitation signal to the resonant structure of the gyroscope to excite the working mode, and the excitation resonant structure vibrates in the drive mode; at the same time, the detection After the control signal is modulated, it is applied to the detection electrode of the gyroscope, and the detection electrode sends an excitation signal to the resonant structure of the gyroscope to excite the working m...

Embodiment 2

[0096] Such as Figure 7 As shown, this embodiment provides a method for multi-modal cooperative control driving modal quality factor, including the following steps:

[0097] Step S101, generating drive control parameters and detection control parameters according to the initial parameters; generating drive control signals and detection control signals respectively in response to the drive control parameters and detection control parameters;

[0098] Step S201, the drive control signal is modulated and applied to the drive electrodes of the gyroscope, and the drive electrodes send an excitation signal to the resonant structure of the gyroscope to excite the working mode, and the excitation resonant structure vibrates in the drive mode; at the same time, the detection After the control signal is modulated, it is applied to the detection electrode of the gyroscope, and the detection electrode sends an excitation signal to the resonant structure of the gyroscope to excite the wor...

Embodiment 3

[0110] Such as Figure 8 As shown, a method for detecting modal quality factors through multi-modal cooperative control is provided, the principle of which is the same as that of this embodiment, and will not be repeated here.

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Abstract

The invention discloses a multi-mode cooperative control method and system for a resonant micro-gyroscope and the resonant micro-gyroscope. The method comprises the steps: generating a drive control signal and a detection control signal through system control parameters, modulating the drive control signal and the detection control signal, adding the modulated signals to a drive electrode and a detection electrode, and transmitting a low-order excitation signal to excite a resonant structure to vibrate in a working mode; after normal working of a gyroscope, presetting pumping parameters to generate a pumping signal, adding the pumping signal to a pumping electrode, sending a sideband excitation signal, and exciting a high-order coupling mode; analyzing the motion state of the gyroscope working mode to obtain a real-time quality factor; when a difference between a real-time quality factor and a target is greater than a threshold value, adjusting a driving control parameter, a detectioncontrol parameter and the pumping parameter according to a gyroscope response signal, and repeating the above steps until the difference between the real-time quality factor and the target reaches thethreshold value; and complete quality factor adjustment. The method is used for solving a problem that the quality factor of the gyroscope cannot be dynamically regulated in the prior art, realizingregulation and improving the mechanical sensitivity of the gyroscope.

Description

technical field [0001] The invention relates to the technical field of resonant micro-gyroscopes, in particular to a multi-mode cooperative control method for resonant micro-gyroscopes based on modal coupling effects, a control system, and a resonant micro-gyroscope including the control system. Background technique [0002] The resonant micro gyroscope is a sensor that measures the angular velocity of the carrier relative to the inertial space rotation, and is also the basic core device in the application fields of motion measurement, inertial navigation, guidance control, intelligent control, etc. With the development of related technologies such as its structural design and manufacturing, resonant micro gyroscopes are widely used in military and commercial fields. The resonant micro-gyroscope has significant structural advantages such as small size, high reliability, low power consumption, low cost, and easy mass production, and is especially suitable for applications wit...

Claims

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Application Information

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IPC IPC(8): G01C25/00G01C19/56
CPCG01C19/56G01C25/005
Inventor 李青松吴学忠路阔肖定邦吴宇列侯占强周鑫张勇猛卓明孙江坤许一王鹏
Owner NAT UNIV OF DEFENSE TECH
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