Multi-mode cooperative control method and system for resonant micro-gyroscope and resonant micro-gyroscope
A collaborative control, multi-modal technology, applied in measurement devices, instruments, steering sensing equipment, etc., can solve the problem of low mechanical sensitivity of gyroscopes, and achieve the effect of reducing quality factor, improving overall performance, and fast switching.
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Embodiment 1
[0052] Such as Figure 6 As shown, a multimodal cooperative control method for driving modalities and detecting modal quality factors includes the following steps:
[0053] Step S1, generating drive control parameters and detection control parameters according to the initial parameters; generating drive control signals and detection control signals respectively in response to the drive control parameters and detection control parameters;
[0054] Step S2, the drive control signal is modulated and applied to the drive electrodes of the gyroscope, and the drive electrodes send an excitation signal to the resonant structure of the gyroscope to excite the working mode, and the excitation resonant structure vibrates in the drive mode; at the same time, the detection After the control signal is modulated, it is applied to the detection electrode of the gyroscope, and the detection electrode sends an excitation signal to the resonant structure of the gyroscope to excite the working m...
Embodiment 2
[0096] Such as Figure 7 As shown, this embodiment provides a method for multi-modal cooperative control driving modal quality factor, including the following steps:
[0097] Step S101, generating drive control parameters and detection control parameters according to the initial parameters; generating drive control signals and detection control signals respectively in response to the drive control parameters and detection control parameters;
[0098] Step S201, the drive control signal is modulated and applied to the drive electrodes of the gyroscope, and the drive electrodes send an excitation signal to the resonant structure of the gyroscope to excite the working mode, and the excitation resonant structure vibrates in the drive mode; at the same time, the detection After the control signal is modulated, it is applied to the detection electrode of the gyroscope, and the detection electrode sends an excitation signal to the resonant structure of the gyroscope to excite the wor...
Embodiment 3
[0110] Such as Figure 8 As shown, a method for detecting modal quality factors through multi-modal cooperative control is provided, the principle of which is the same as that of this embodiment, and will not be repeated here.
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