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Conveying device, conveying method and net stretching device

A technology of a transmission device and a transmission unit, which is applied in the field of transmission devices and netting devices, and can solve problems such as poor precision of mask plate stretching, and achieve the effect of improving position accuracy and net stretching accuracy

Active Publication Date: 2020-09-04
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The object of the present invention is to provide a transmission device, a transmission method and a netting device, so as to improve the problem of poor precision in stretching the reticle

Method used

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  • Conveying device, conveying method and net stretching device
  • Conveying device, conveying method and net stretching device
  • Conveying device, conveying method and net stretching device

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Embodiment Construction

[0045] As mentioned in the background technology, most of the existing reticles have the problem of poor stretching precision. After research, the applicant found that the reason for the poor stretching precision of the reticle is mainly because the work table of the stretching equipment does not perform Rz compensation on the reticle. function, that is, when there is a deviation in the position of the reticle in the Rz direction, the workpiece stage cannot adjust the position of the reticle to compensate for the deviation of the reticle in the Rz direction. The applicant also found that if the Rz compensation for the reticle is realized through the movement of the workpiece table in the stretching equipment, due to the large mass of the workpiece table, the cost of controlling the rotation of the workpiece table to perform Rz compensation for the reticle is high, and the control accuracy is low. Compensation is limited.

[0046] Based on this, the present application proposes...

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Abstract

The invention provides a conveying device, a conveying method and a net stretching device. The conveying device is used for conveying masks, and the masks are loaded in a tray. The conveying device comprises a mask library unit, a conveying unit, a detection unit and a pre-compensation unit. The mask library unit is used for providing the tray, the conveying unit is used for taking out the tray from the mask library unit and conveying the masks in the tray to the pre-compensation unit, the detection unit is used for detecting and acquiring the offset of the masks in the Rz direction, and the pre-compensation unit is used for adjusting the positions of the masks according to the offset of the masks in the Rz direction so as to compensate the offset of the masks in the Rz direction. According to the conveying device, the conveying method and the net stretching device, the offset of the masks in the Rz direction can be compensated, the position accuracy of the masks in the Rz direction can be improved, and the net stretching precision is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a transmission device, a transmission method and a netting device. Background technique [0002] Tension screen equipment is the key equipment of OLED small molecule organic material evaporation production line. It is responsible for fixing the high-precision evaporation screen (mask) on the screen frame, so that the image position of the screen is correct, not deformed, and not distorted during the subsequent work process. In the OLED evaporation process, the reticle acts as a template for evaporating the pattern on the reticle on the surface of the glass substrate. [0003] In the stretching equipment, the transfer device is responsible for transporting the mask to the handover position of the grippers of the stretching equipment, and the grippers transfer it to the workpiece table. The material of the mask plate is Invar, the length is 1200mm, the width is 20mm-400mm, and t...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/24C23C14/12H10K71/00
Inventor 吴福龙黄元昊
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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