Modal matching type micro-mechanical Z-axis annular resonant gyroscope based on graphical compensation

Abstract

The invention relates to a modal matching type micro-mechanical Z-axis annular resonant gyroscope based on graphical compensation. The modal matching type micro-mechanical Z-axis annular resonant gyroscope is characterized by comprising a substrate, an anchor point, a central shaft, supporting beams in driving / detecting direction, a resonant ring and fixed electrodes. The gyroscope is made of silicon (100), four supporting beams in the driving / detecting direction coincide with or are perpendicular to the [110] direction and the [100] direction of the silicon respectively, and the included angle between every two supporting beams is 45 degrees. After the supporting beam in the driving direction is subjected to graphical compensation, the equivalent rigidity of the supporting beam is equal to that in the detection direction. The resonant ring is connected with the central shaft through the supporting beam. The 16 fixed electrodes are uniformly distributed on the outer side of the resonant ring. The fixed electrodes and the neutral axis are connected with the substrate through the anchor point, and the substrate is provided with metal wires to achieve electrical connection with a rear-end circuit. According to the invention, (100) monocrystalline silicon Young modulus asymmetry compensation is carried out from the perspective of graphical design, modal matching is realized, and the gyro after modal matching can play an important role in high-precision measurement of angular velocity.

Description

Technical field: [0001] The invention relates to a micro-mechanical gyroscope, in particular to a pattern-matched micro-mechanical Z-axis ring resonant gyroscope based on graphic compensation. Background technique: [0002] A gyroscope is a device used to detect the angular velocity of an object as it rotates. The micromechanical gyroscope is a gyroscope manufactured based on microelectronic technology. Its advantages include mass production, low cost, high yield, small size, light weight, low power consumption, impact resistance, and is not easily disturbed by complex environments. Integration, etc., are currently widely used in the fields of consumer electronics, industrial control, automobiles, weapons and aerospace. The mode-matched micromechanical resonant ring gyroscope is the most accurate type of gyroscope among the currently known and marketed micromechanical gyroscopes. It works in the mode-matching mode, that is, the driving frequency is equal to the detection fr...

AI Technical Summary

Problems solved by technology

[0003] However, due to the non-ideal characteristics and effects of the processing material and processing process, the driving frequency and detection frequency of the gyroscope cannot be equal, which affects the detection accuracy

Taking (100) monocrystalline silicon most commonly used in microelectronics monolithic integration as an example, the Young's modulus of (100) monocrystalline silicon is not symmetrical along its central axis. In other words, the (100) monocrystalline silicon process The micromechanical resonant gyroscope cannot realize the equal or nearly equal driving frequency and detection frequency

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