Miniaturized side-mounted differential integrated resonant accelerometer
An accelerometer and differential type technology, applied in the field of micro-mechanical electronic digital accelerometers, can solve the problems of high processing difficulty, small processing residual stress, small precision structure processing deformation, and high cost, so as to achieve low processing residual stress and improve basic accuracy. , The effect of high machining accuracy
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[0018] The structure and working principle of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0019] refer to figure 1 , a miniaturized side-mounted differential type integrated resonant accelerometer, including a metal base 1 and a first double-end fixed support quartz tuning fork 2-a, a second double-end fixed support quartz tuning fork 2-b, the metal base 1 includes Mass block 3, flexible hinge 4 and fixed metal base 5, mass block 3 is connected with fixed metal base 5 by flexible hinge 4, flexible hinge 4 is positioned at the middle part of mass block 3 and fixed metal base 5; The double-ended fixed-supported quartz tuning fork 2-a and the second double-ended fixed-supported quartz tuning fork 2-b have the same structure, are mounted on the side of the metal base 1 and the fixed metal base 5, and are arranged in a differential manner; this differential The layout method not only greatly reduces the size of the accel...
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