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Resistor based on carbon film nano conductive material and preparation method thereof

A technology of nano-conductivity and resistors, which is applied in the coating process of metal materials, the use of electrical devices, the use of electromagnetic means, etc., can solve the problems of poor wear resistance and poor reliability of sensors, and achieve excellent solvent resistance, adjustable conductivity, and processing high precision effect

Active Publication Date: 2022-01-07
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of poor wear resistance of the existing conductive plastic potentiometric displacement sensor, which leads to poor reliability of the sensor, and provides a resistor based on carbon film nano conductive material and its preparation method

Method used

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  • Resistor based on carbon film nano conductive material and preparation method thereof
  • Resistor based on carbon film nano conductive material and preparation method thereof
  • Resistor based on carbon film nano conductive material and preparation method thereof

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specific Embodiment approach 1

[0025] Specific implementation mode one: the following combination figure 1 Describe this embodiment mode, the resistor body based on carbon film nano conductive material described in this embodiment mode, is characterized in that, it comprises substrate ceramics 1, resistance film 2, metal pad 3 and signal lead-out hole 4;

[0026] The substrate ceramic 1 has a ring-shaped structure, and a metal pad 3 with an opening is printed on the inner surface of the ring of the substrate ceramic 1, and a signal lead-out hole 4 is provided on the substrate ceramic 1 at the opening of the metal pad 3. A resistive film 2 is prepared on the outer surface of the substrate ceramic 1;

[0027] The resistive thin film 2 is a carbon film nano-conductive material prepared based on a carbon-constantan double-target co-sputtering method.

specific Embodiment approach 2

[0028] Specific implementation mode two: the following combination figure 1 , figure 2 with image 3 Describe this embodiment, the preparation method of the resistor body based on the carbon film nano conductive material described in this embodiment, the preparation method is used to prepare the resistor body based on the carbon film nano conductive material, the preparation method includes:

[0029] S1. Using a cast platform to prepare the ceramic powder into a cast film, and then use a cutting machine to cut it into a substrate ceramic 1 according to the set size;

[0030] S2. Making a via hole on the substrate ceramic 1 prepared in S1, and filling the via hole with metal paste to form a signal lead-out hole 4;

[0031] S3, the metal pad 3 is screen-printed, and then sintered to form a cooked porcelain substrate;

[0032] S4. Put the cooked porcelain substrate obtained in S3 into the vacuum coating chamber, and prepare the resistive film 2 of carbon film nano conductive ...

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Abstract

A resistor body based on a carbon film nano conductive material and a preparation method thereof belong to the technical field of sensor preparation. The invention aims to solve the problem of poor wear resistance of the existing conductive plastic potentiometric displacement sensor, which leads to poor reliability of the sensor. According to the present invention, the resistor body based on carbon film nano-conductive material comprises substrate ceramics, resistor films, metal pads and signal lead-out holes; A metal pad with an opening is printed, and a signal lead-out hole is provided on the substrate ceramic at the opening of the metal pad, and a resistive film is prepared on the outer surface of the substrate ceramic; the resistive film is based on carbon-constantan double-target co-sputtering Carbon film nano conductive material prepared by radiation method. The invention is used for the preparation of resistors.

Description

technical field [0001] The invention relates to a resistor body based on a carbon film nano conductive material and a preparation method thereof, belonging to the technical field of sensor preparation. Background technique [0002] As the cutting-edge technology of modern science and technology, sensor is considered to be one of the three pillars of modern information technology, and it is also recognized as the most promising high-tech industry at home and abroad. The displacement sensor is one of the most widely used types in the sensor family and has always played an important role. According to different motion modes, displacement sensors are divided into linear displacement sensors and angular displacement sensors. According to different measurement principles, they can be divided into potential type, inductive type, capacitive type, differential transformer type, eddy current type and so on. Among them, the potentiometric displacement sensor is widely used in aerospac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/00G01B7/30C23C14/06C23C14/35
CPCG01B7/00G01B7/30C23C14/0605C23C14/352
Inventor 咸婉婷徐冬王洋洋张伟岩刘志远刘继江兰昕昊李旭辉杨思远宋成君
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP