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Preparation method for alloy target material and alloy target material prepared by preparation method

A technology of alloy target and target material, applied in the field of target material, can solve the problems of poor ratio precision and uneven mixing of alloy target material, and achieve the effects of improving precision, improving production efficiency and high precision

Active Publication Date: 2020-10-27
厦门佰事兴新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the process of conveying with the working gas, due to the different density and weight of the two powders, the proportion of the nickel-chromium mixed powder m

Method used

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  • Preparation method for alloy target material and alloy target material prepared by preparation method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Example 1: A method for preparing an alloy target, such as figure 1 shown, including the following steps:

[0031] S1. Preparation of alloy powder: choose not less than two kinds of metal powders and mix them into mixed alloy powders according to the required ratio and put them in the powder mixing box; in this embodiment, two metal powders of titanium and molybdenum are used for mixing, and the powders are required to be mixed. Strength of D50 is 15μm ~ 45μm, purity ≥ 99.5%;

[0032] S2. Prepare the base tube: select a non-magnetic stainless steel tube of suitable size as the base tube of the target material, and perform machining, and clean, sandblast, and prime the surface of the steel tube base; the sandblasting process uses cast steel grit ;

[0033] S3. Send the powder mixing box to the spraying gun through the powder feeder, and carry out secondary mixing and stirring in the spraying gun, so that the ratio of the alloy powder in the spraying gun is consistent w...

Embodiment 2

[0040] Embodiment 2: This embodiment is to provide an alloy target, which is prepared by the preparation method in Embodiment 1, including the first metal and the second metal, and the content of the first metal is 70%-90% atomic percentage, and the remaining The amount is the second metal and unavoidable impurities. The oxygen content of the target impurity is less than 100ppm, and the relative density is greater than 99%. The first metal is silicon, and the second metal is aluminum. The ratio of the first metal to the second metal is 70: 30. Therefore, after being prepared according to the preparation method of Example 1, the ratio error of the first metal and the second metal in the alloy target is small, the uniformity is good, the stability is improved, and the sputtering effect is good.

Embodiment 3

[0041] Embodiment 3: The difference between this embodiment and Embodiment 2 is that the first metal is selected from silicon, and the second metal is selected from aluminum, wherein the ratio of the first metal to the second metal is 90:10, so that according to the preparation method of Embodiment 1 After being obtained, the proportion error of the first metal and the second metal in the alloy target is small, the uniformity is good, the stability is improved, and the sputtering effect is good.

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Abstract

The invention discloses a preparation method for an alloy target material and the alloy target material prepared by the preparation method, which relate to the technical field of target materials. According to the technical scheme, the key point is that the preparation method comprises the following steps: S1, preparing alloy powder: selecting two kinds of metal powder, and mixing the powder according to a required proportion, and putting the mixed powder into a powder mixing box; step S2, preparing a base tube: selecting a steel tube as the base tube of the target material, and performing cleaning treatment, sand-blasting treatment and bottoming treatment on the steel tube; S3, feeding the powder mixing box into a spraying spray gun through a powder feeder, and performing secondary mixingand stirring in the spraying spray gun; S4, rotating the base tube of the target material, spraying the mixed powder which is mixed and stirred for a second time onto the surface of the base tube ofthe target material through the spray gun, thereby preparing the target material; and S5, machining the sprayed target material to prepare an alloy target material finished product. According to the preparation method disclosed by the invention, the mixed powder is mixed and stirred uniformly for a second time in the spraying spray gun, so that the proportion of the sprayed-out mixed powder is guaranteed to be unchanged, and therefore, the effect of improving precision of the alloy target material is achieved.

Description

technical field [0001] The invention relates to the technical field of target materials, more specifically, it relates to a method for preparing an alloy target material and the alloy target material prepared by the method. Background technique [0002] The target material is the raw material of vacuum coating, and the purity and density of the target material directly affect the composition and comprehensive performance of the film system. At present, the requirements for target materials are not limited to single-component targets. For industries such as glass, semiconductor, and communication industries, alloy targets are usually required. In the prior art, thermal spraying process is usually used to send the mixed two metal powders to Until the spray gun is sprayed on the surface of the target substrate tube, it is worth the alloy target. [0003] For example, the application publication number is CN110453186A, and the Chinese patent with the publication date of 2019.11...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C24/04B22F1/00C22C28/00
CPCB22F1/0003C23C14/3414C23C24/045C22C28/00Y02P10/25
Inventor 廖龙辉罗文富陈发海罗承钦叶名飞
Owner 厦门佰事兴新材料科技有限公司
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