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Ultrasonic suspension rotary micro-channel plate corrosion method

A channel plate and ultrasonic technology, applied in the direction of electron multiplier details, electron multiplier tubes, discharge tubes, etc., can solve the problem of high roughness of the channel wall, the inability to improve the service life and gain of the micro-channel plate, and the inability to effectively reduce impurities on the inner wall of the channel Problems such as the shape of the inner wall of the attachment channel are beneficial to the shape, the corrosion process is smooth and efficient, and the service life and gain are improved.

Active Publication Date: 2020-10-30
NORTH NIGHT VISION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the roughness of the channel wall obtained by this process is still relatively high, and it cannot effectively reduce the adhesion of impurities on the inner wall of the channel and effectively improve the morphology of the inner wall of the channel, so that the service life and gain of the microchannel plate cannot be improved.

Method used

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  • Ultrasonic suspension rotary micro-channel plate corrosion method
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  • Ultrasonic suspension rotary micro-channel plate corrosion method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] The microchannel plate blank after optical cold working used in this embodiment has a diameter of 25 mm, a thickness of 0.35 mm, and a channel aperture of 5 μm. Six parallel samples (sample 1-sample 6) are etched according to the above-mentioned etching method, wherein the acid concentration Be 0.5mol / L, the alkali concentration in step (3) D is 2.5mol / L, the alkali concentration in step (3) F is 1.3mol / L, in another preferred embodiment, step (3) D The alkali concentration in step (3)F can also be 3.5mol / L, and the alkali concentration in step (3)F can also be 2.8mol / L.

[0061] The roughness, life and gain of the inner wall of the corroded samples 1-6 were measured, and the results are shown in Table 1.

[0062] Table 1

[0063]

Embodiment 2

[0065] The microchannel plate blank after optical cold working used in this embodiment has a diameter of 25 mm, a thickness of 0.35 mm, and a channel aperture of 6 μm. Take 6 parallel samples (sample 7-sample 12) and corrode according to the above-mentioned etching method, wherein the acid concentration is 2mol / L, the alkali concentration in step (3) D is 2.5mol / L, the alkali concentration in step (3) F is 1.3mol / L, in another preferred embodiment, in step (3) D The alkali concentration in the step (3)F can also be 3.5mol / L, and the alkali concentration in step (3)F can also be 2.8mol / L.

[0066] The roughness, life and gain of the inner wall of the corroded sample were measured, and the results are shown in Table 2.

[0067] Table 2

[0068]

Embodiment 3

[0070] The microchannel plate blank after optical cold processing used in this embodiment has a diameter of 25 mm, a thickness of 0.35 mm, and a channel aperture of 7 μm. Six parallel samples (sample 13-sample 18) are etched according to the above-mentioned etching method, wherein the acid concentration is 1mol / L, the alkali concentration in step (3) D is 2.5mol / L, the alkali concentration in step (3) F is 1.3mol / L, in another preferred embodiment, in step (3) D The alkali concentration in the step (3)F can also be 3.5mol / L, and the alkali concentration in step (3)F can also be 2.8mol / L.

[0071] The roughness, life and gain of the inner wall of the corroded sample were measured, and the results are shown in Table 3.

[0072] table 3

[0073]

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Abstract

The invention discloses an ultrasonic suspension rotary type micro-channel plate corrosion method. The method comprises the following steps: guiding a blank piece obtained after cold machining into aclamp; sequentially putting the clamp into absolute ethyl alcohol and water for ultrasonic cleaning; and alternately putting the cleaned clamp into an acid tank and an alkali tank for ultrasonic suspension rotary corrosion, and controlling the reaction temperature and reaction time of the acid tank and the alkali tank to obtain the microporous array micro-channel plate. The micro-channel plate obtained through the corrosion method is sound in inner wall morphology and high in surface quality, the service life of the micro-channel plate is prolonged, the gain of the micro-channel plate is increased, the corrosion time is short, and the production efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of micro-optical element manufacturing, in particular to an ultrasonic levitation rotary microchannel plate corrosion method. Background technique [0002] Microchannel plate (MPC) is a special optical fiber device. It is an advanced electron multiplier with the function of transmitting and enhancing electronic images. Low-level advantages, it uses its secondary electron emission characteristics to multiply the electrons colliding with the inner wall (channel) at high speed, so that it can increase the electron flow by more than 10,000 times. [0003] The micro-channel plate made by soluble glass core technology, the core material glass only plays a supporting role in the corrosion process, the removal of the core material, that is, the corrosion core material process is the key process of the micro-channel plate production, usually polished and cleaned The MCP semi-finished product is immersed in an etchan...

Claims

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Application Information

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IPC IPC(8): H01J43/24H01J9/12
CPCH01J43/246H01J9/125
Inventor 张正君李涛丛晓庆李婧雯乔芳建邱祥彪毛汉祺牛鹏杰张欢赵慧民
Owner NORTH NIGHT VISION TECH
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