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Complex 3D Microhole Machining Method Based on Interaction Control of Laser and Liquid

A kind of micro-hole processing and complex technology, applied in the field of femtosecond laser applications, it can solve the problems of difficulty in chip discharge, and achieve the effect of reducing spherical aberration, improving processing length, and high aspect ratio

Active Publication Date: 2022-05-20
北京理工大学重庆创新中心 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The complex three-dimensional microhole processing method based on the interaction regulation between laser and liquid provided by the present invention mainly solves the technical problem that there are still difficulties in debris discharge

Method used

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  • Complex 3D Microhole Machining Method Based on Interaction Control of Laser and Liquid
  • Complex 3D Microhole Machining Method Based on Interaction Control of Laser and Liquid
  • Complex 3D Microhole Machining Method Based on Interaction Control of Laser and Liquid

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Embodiment 1

[0046] Using 0-100% volume fraction of ethanol aqueous solution as auxiliary liquid, 10% as a step size, applying femtosecond laser with 1mW energy to process micropores in borosilicate glass samples. The specific processing steps are as follows:

[0047] Sample preparation: Prepare a 10mm×20mm×1mm borosilicate glass sample, ultrasonically clean it with ethanol aqueous solution and dry it, and use it as the sample to be processed.

[0048] Solution preparation: prepare 0-100% ethanol aqueous solution, 10% is a step size, measure quantitative 99.9% pure ethanol and distilled water to obtain 50mL ethanol aqueous solution, add it to a beaker and stir. Let it stand for fifteen minutes and wait for all the bubbles in the solution to disappear. Obtain 0-100% volume fraction ethanol aqueous solution through the above steps, and then add it into the container until it covers the upper surface of the sample.

[0049] Optical path adjustment: The femtosecond laser system 1 generates a...

Embodiment 2

[0053] Controllable three-dimensional micropores were processed in borosilicate glass samples by using femtosecond laser with 40% ethanol aqueous solution as auxiliary liquid. The specific processing steps are as follows:

[0054] Sample preparation: Prepare a borosilicate glass sample of 10mm×20mm×0.5mm, ultrasonically clean it with ethanol aqueous solution and dry it as the sample to be processed.

[0055] Solution preparation: configure 40% ethanol aqueous solution by volume fraction, measure 20ml of 99.9% absolute ethanol with a graduated cylinder and transfer it to a beaker, then measure 30ml of distilled water and add it to the beaker for stirring. Let it stand for fifteen minutes until all the bubbles in the solution disappear. The ethanol aqueous solution with a volume fraction of 40% was obtained through the above steps, and then added into the container until it covered the upper surface of the sample.

[0056] Optical path adjustment: the femtosecond laser system ...

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Abstract

The invention provides a complex three-dimensional micropore processing method based on the interaction between laser and liquid, which includes fixing the sample to be processed in a container, and the container is fixed on a six-dimensional translation platform; preparing ethanol aqueous solution, and then adding it to the container until the upper surface of the sample to be processed is covered; after the femtosecond laser system generates the femtosecond laser, the energy adjustment device is used to adjust the laser energy, and the polarization direction of the outgoing femtosecond laser is horizontal; the adjusted beam is vertically incident on the The water immersion objective lens focuses through the water immersion objective lens and makes the focal point below the lower surface of the sample to be processed; controls the movement of the six-dimensional translation stage so that the focal spot beam passing through the water immersion objective lens moves relative to the sample to be processed, making femtosecond The laser performs scanning ablation of a specific trajectory, thereby realizing the processing of complex three-dimensional microholes on the sample to be processed; it solves the problems existing in the existing traditional liquid-assisted femtosecond laser processing of microholes, and realizes complex microhole processing with a higher depth-to-diameter ratio .

Description

technical field [0001] The invention relates to the field of femtosecond laser application technology, in particular to a complex three-dimensional microhole processing method based on the interaction regulation between laser and liquid. Background technique [0002] Microwells have a wide range of applications in fields such as microfluidics, biomedicine, and leak testing. Due to the needs of practical applications, the characteristics of the depth-to-diameter ratio, quality, and precision of micropores play a vital role in these studies. For example, in the sealing test, it is necessary to process microholes with high aspect ratio on the medicine bottle, the diameter of the holes is about 3 microns, and the depth is greater than 500 microns. Therefore, how to process complex three-dimensional micropores with high aspect ratio and high quality is a very challenging research content. [0003] Traditional mechanical processing is difficult to meet its basic needs, while ele...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/046B23K26/382B23K26/70
CPCB23K26/382B23K26/702B23K26/046
Inventor 姜澜杨炳东韩伟娜李晓炜
Owner 北京理工大学重庆创新中心