Dichroic mirror based on sandwich-like interface and composite material and its preparation method

A composite material and dichroic mirror technology, applied in metal material coating process, instruments, optical components, etc., can solve the problems of complex process and difficult preparation, and achieve the effect of increasing flexibility and improving laser damage threshold.
CN112063974BActive Publication Date: 2021-05-04SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
Publication Date
2021-05-04

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Abstract

A dichroic mirror based on a sandwich-like interface and a composite material and a preparation method thereof. Using electron beam evaporation technology to simultaneously deposit material A with a refractive index greater than 1.8 and material B with an optical band gap greater than 6.0eV to form a composite material to replace the single high refractive index material in the conventional dichroic mirror film as the high refractive index film layer H, using A single low-refractive-index material C is used as the low-refractive-index film layer L; by controlling the deposition rates of material A, material B, and material C, a sandwich-like transition interface is formed between the high-refractive-index film layer and the low-refractive-index film layer. The transition interface structure is A+B gradient material layer|A|A+C gradient material layer. In the present invention, the interface between the high-refractive-index film layer and the low-refractive-index film layer is designed as a sandwich-like transitional interface, and the properties such as interface bonding force and laser damage threshold of the dichroic mirror are improved without affecting the spectral performance of the film.
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Description

technical field

[0001] The invention relates to an optical thin film, in particular to a dichroic mirror based on a sandwich-like interface and a composite material and a preparation method thereof. Background technique

[0002] Dichroic mirrors are often used as beam splitters, beam combiners or harmonic separation devices, and play an important role in many kinds of lasers. An ideal dichroic mirror not only requires high transmittance in certain wavelength bands and high reflectivity in other wavelength bands, but also requires high laser damage threshold in both wavelength bands. SiO 2 Due to the advantages of low absorption loss, large optical band gap, and high laser damage threshold, it is the most commonly used low-refractive index coating material for dichroic mirrors. HfO 2 and Al 2 o 3 It is a high refractive index material commonly used in the preparation of dichroic mirrors. In contrast, HfO 2 With higher refractive index, using HfO 2 / SiO 2 The design a...

Claims

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