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Dichroic mirror based on sandwich-like interface and composite material and its preparation method

A composite material and dichroic mirror technology, applied in metal material coating process, instruments, optical components, etc., can solve the problems of complex process and difficult preparation, and achieve the effect of increasing flexibility and improving laser damage threshold.

Active Publication Date: 2021-05-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

However, this method involves the preparation of dozens or even hundreds of nano-thin layers. The more the number of nano-thin layers, the thinner the thickness of the thin layer, the more complicated the process, and the greater the difficulty of preparation.

Method used

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  • Dichroic mirror based on sandwich-like interface and composite material and its preparation method
  • Dichroic mirror based on sandwich-like interface and composite material and its preparation method
  • Dichroic mirror based on sandwich-like interface and composite material and its preparation method

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Embodiment Construction

[0034] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0035] Taking the incident at an angle of 45 degrees, the reflectivity of the s-polarized component at 532nm>99.5%, and the transmittance of the p-polarized component in the 800-1053nm band>98% as an example, it is illustrated that the present invention is based on a sandwich-like interface and composite Dichroic mirrors of materials and methods for their preparation, figure 2 It is a schematic diagram of the deposition rate of several materials in the embodiment. The method includes the following steps:

[0036] ① Coating parameter setting:

[0037] Film system designed according to the required optical performance requirements: S|2D 0.5M(DM) 13D 0.5M 4.45D|Air, where S represents the substrate, and M represents HfO with an optical thickness of λ / 4 (λ refers to the design wavelength of the film system, which is 595nm) 2 and Al 2 o 3 Composite hi...

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Abstract

A dichroic mirror based on a sandwich-like interface and a composite material and a preparation method thereof. Using electron beam evaporation technology to simultaneously deposit material A with a refractive index greater than 1.8 and material B with an optical band gap greater than 6.0eV to form a composite material to replace the single high refractive index material in the conventional dichroic mirror film as the high refractive index film layer H, using A single low-refractive-index material C is used as the low-refractive-index film layer L; by controlling the deposition rates of material A, material B, and material C, a sandwich-like transition interface is formed between the high-refractive-index film layer and the low-refractive-index film layer. The transition interface structure is A+B gradient material layer|A|A+C gradient material layer. In the present invention, the interface between the high-refractive-index film layer and the low-refractive-index film layer is designed as a sandwich-like transitional interface, and the properties such as interface bonding force and laser damage threshold of the dichroic mirror are improved without affecting the spectral performance of the film.

Description

technical field [0001] The invention relates to an optical thin film, in particular to a dichroic mirror based on a sandwich-like interface and a composite material and a preparation method thereof. Background technique [0002] Dichroic mirrors are often used as beam splitters, beam combiners or harmonic separation devices, and play an important role in many kinds of lasers. An ideal dichroic mirror not only requires high transmittance in certain wavelength bands and high reflectivity in other wavelength bands, but also requires high laser damage threshold in both wavelength bands. SiO 2 Due to the advantages of low absorption loss, large optical band gap, and high laser damage threshold, it is the most commonly used low-refractive index coating material for dichroic mirrors. HfO 2 and Al 2 o 3 It is a high refractive index material commonly used in the preparation of dichroic mirrors. In contrast, HfO 2 With higher refractive index, using HfO 2 / SiO 2 The design a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/30C23C14/10C23C14/08C23C14/54G02B1/10
CPCC23C14/30C23C14/10C23C14/083C23C14/081C23C14/54G02B1/10
Inventor 朱美萍刘天宝李静平李大伟刘晓凤赵元安邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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