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A kind of preparation device of large diameter diamond sheet and preparation method thereof

A diamond sheet and preparation device technology, applied in chemical instruments and methods, single crystal growth, single crystal growth, etc., can solve the problems of difficult peeling, difficult splicing, expensive equipment, etc., and achieve high preparation efficiency, good quality, The effect of simple process equipment

Active Publication Date: 2021-09-07
DONGGUAN INST OF OPTO ELECTRONICS PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since mosaic splicing needs to select seed crystals with the same crystal orientation, splicing is difficult, and ion implantation is used to strip after growth. The equipment is expensive and the stripping is difficult.

Method used

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  • A kind of preparation device of large diameter diamond sheet and preparation method thereof
  • A kind of preparation device of large diameter diamond sheet and preparation method thereof
  • A kind of preparation device of large diameter diamond sheet and preparation method thereof

Examples

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Effect test

no. 1 example

[0047] This embodiment provides a large-diameter diamond sheet preparation device with a simple foundation, including a housing 10, a slit partition 11, an elevating rotating support 20, a diameter detection unit 30 and a mask unit 40, the slit partition The plate 11 is provided with a through hole 15 that can pass through the diamond disc 50. The lifting type rotating bracket 20 includes a lifting rod device 21, a rotating motor 22 and a rotating shaft 23. The rotating shaft 23 is provided with a mounting position. The diamond disc 50 Adhered to the mounting position, the mask unit 40 includes a set of graphite masks, which are clamped on both sides of the diamond wafer 50 .

no. 2 example

[0049] This embodiment provides a preparation device capable of producing multiple large-diameter diamond sheets at the same time, including a housing 10, a slit partition 11, an elevating rotating support 20, a diameter detection unit 30 and a mask unit 40, narrowly The slit partition 11 is provided with three through holes 15 through which the diamond disc 50 can pass. The lifting type rotating bracket 20 includes a lifting rod device 21, a rotating motor 22 and a rotating shaft 23. The rotating shaft 23 is provided with three installation positions, three The diamond discs 50 are bonded to corresponding installation positions respectively. The mask unit 40 includes three sets of graphite masks, and the three sets of graphite masks are respectively clamped on both sides of the corresponding diamond discs 50 . In this embodiment, the number of growths is increased by increasing the installation positions of the rotating shaft 23 .

[0050] see Figure 4 Shown, the present in...

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Abstract

The invention relates to the technical field of crystal synthesis, in particular to a preparation device and a preparation method of a large-diameter diamond sheet. The plate is divided into an upper chamber and a lower chamber, and microwave plasma is provided in the upper chamber; the method of the present invention drives the diamond disc to rotate and lift through the lifting rotary bracket, and a part of the diamond disc is exposed to the microwave plasma through the slit partition. In the body, the mask unit coats a mask on the diamond disc to suppress the axial growth of the diamond disc, so that the diamond disc only grows along the radial rotation, thereby growing a large-diameter diamond disc; and according to the diameter detection unit Feedback, as the diameter of the diamond disc grows larger, the lifting rotating support is gradually lowered to keep the top height of the diamond disc constant, so as to form a stable growth environment under the microwave plasma.

Description

technical field [0001] The invention relates to the technical field of crystal synthesis, in particular to a preparation device and a preparation method for growing large-diameter diamond sheets by using a microwave plasma chemical vapor deposition method. Background technique [0002] Single crystal diamond has excellent physical and chemical properties, especially in the fields of optical windows, heat dissipation, and electronic devices. In order to expand these applications, it is necessary to prepare large-area diamond sheets. Among various diamond preparation methods, microwave plasma chemical vapor deposition has become the preferred method for preparing high-quality diamond due to its high plasma power density, no electrode discharge pollution and stable performance. In the process of producing large-area single-crystal diamond in the current method, it is generally used to fix the diamond seed crystal on the deposition table, mosaic splicing, and control the tempera...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/04C30B25/04C30B25/12
CPCC30B25/04C30B25/12C30B29/04
Inventor 王忠强陶仁春梁智文王琦张国义
Owner DONGGUAN INST OF OPTO ELECTRONICS PEKING UNIV