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Preparation device and preparation method of large-diameter diamond wafer

A diamond sheet and preparation device technology, applied in chemical instruments and methods, from chemically reactive gases, single crystal growth, etc., can solve the problems of expensive equipment, difficult peeling, difficult splicing, etc., to achieve good quality and high production efficiency High, simple process and equipment effect

Active Publication Date: 2020-12-11
DONGGUAN INST OF OPTO ELECTRONICS PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since mosaic splicing needs to select seed crystals with the same crystal orientation, splicing is difficult, and ion implantation is used to strip after growth. The equipment is expensive and the stripping is difficult.

Method used

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  • Preparation device and preparation method of large-diameter diamond wafer
  • Preparation device and preparation method of large-diameter diamond wafer
  • Preparation device and preparation method of large-diameter diamond wafer

Examples

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Effect test

no. 1 example

[0047] This embodiment provides a large-diameter diamond sheet preparation device with a simple foundation, including a housing 10, a slit partition 11, an elevating rotating support 20, a diameter detection unit 30 and a mask unit 40, the slit partition The plate 11 is provided with a through hole 15 that can pass through the diamond disc 50. The lifting type rotating bracket 20 includes a lifting rod device 21, a rotating motor 22 and a rotating shaft 23. The rotating shaft 23 is provided with a mounting position. The diamond disc 50 Adhered to the mounting position, the mask unit 40 includes a set of graphite masks, which are clamped on both sides of the diamond wafer 50 .

no. 2 example

[0049] This embodiment provides a preparation device capable of producing multiple large-diameter diamond sheets at the same time, including a housing 10, a slit partition 11, an elevating rotating support 20, a diameter detection unit 30 and a mask unit 40, narrowly The slit partition 11 is provided with three through holes 15 through which the diamond disc 50 can pass. The lifting type rotating bracket 20 includes a lifting rod device 21, a rotating motor 22 and a rotating shaft 23. The rotating shaft 23 is provided with three installation positions, three The diamond discs 50 are bonded to corresponding installation positions respectively. The mask unit 40 includes three sets of graphite masks, and the three sets of graphite masks are respectively clamped on both sides of the corresponding diamond discs 50 . In this embodiment, the number of growths is increased by increasing the installation positions of the rotating shaft 23 .

[0050] see Figure 4 Shown, the present in...

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Abstract

The invention relates to the technical field of crystal synthesis, in particular to a preparation device and a preparation method of a large-diameter diamond wafer. The device comprises a shell, a diameter detection unit, a lifting type rotating support and a mask unit. The shell is divided into an upper cavity and a lower cavity through a slit partition plate, and a microwave plasma is arranged in the upper cavity. According to the method, the diamond wafer is driven to rotate and ascend and descend through the lifting type rotating support, one part of the diamond wafer penetrates through the slit partition plate to be exposed in microwave plasma, the mask unit coats the diamond wafer with a mask, axial growth of the diamond wafer is inhibited, the diamond wafer only rotates and grows inthe radial direction, and therefore, a large-diameter diamond wafer is grown; and according to the feedback of the diameter detection unit, along with the increase of the diameter of the diamond wafer, the lifting type rotating support is gradually reduced, and the top height of the diamond wafer is kept unchanged, so that a stable growth environment is formed under microwave plasma.

Description

technical field [0001] The invention relates to the technical field of crystal synthesis, in particular to a preparation device and a preparation method for growing large-diameter diamond sheets by using a microwave plasma chemical vapor deposition method. Background technique [0002] Single crystal diamond has excellent physical and chemical properties, especially in the fields of optical windows, heat dissipation, and electronic devices. In order to expand these applications, it is necessary to prepare large-area diamond sheets. Among various diamond preparation methods, microwave plasma chemical vapor deposition has become the preferred method for preparing high-quality diamond due to its high plasma power density, no electrode discharge pollution and stable performance. In the process of producing large-area single-crystal diamond in the current method, it is generally used to fix the diamond seed crystal on the deposition table, mosaic splicing, and control the tempera...

Claims

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Application Information

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IPC IPC(8): C30B29/04C30B25/04C30B25/12
CPCC30B25/04C30B25/12C30B29/04
Inventor 王忠强陶仁春梁智文王琦张国义
Owner DONGGUAN INST OF OPTO ELECTRONICS PEKING UNIV
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