Application method of control system for precisely measuring abbe errors

A precision measurement and Abbe error technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low measurement accuracy and achieve the effects of improving accuracy, adjusting level, and facilitating disassembly and storage

Active Publication Date: 2020-12-11
常州巨特智能机械有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the shortcomings of the existing technology that the measurement accuracy is low due to the influence of the Abbe error when using heterodyne interference for precision measurement, and to provide a method for using the Abbe error control system for precision measurement. For the monitoring and regulation of the Abbe error that affects the measurement, use auxiliary equipment to control the influence of the wheelbase in the lateral direction within a reasonable range of error, and improve the accuracy of precision measurement

Method used

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  • Application method of control system for precisely measuring abbe errors
  • Application method of control system for precisely measuring abbe errors
  • Application method of control system for precisely measuring abbe errors

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Embodiment 1

[0038] like figure 1 As shown, the present embodiment relates to a method for using a precision measurement Abbe error control system, including the following steps:

[0039] S1: Install the laser precision measuring instrument in the precision measurement Abbe error control system, adjust the horizontal height of the measurement axis of the laser precision measurement instrument to be on the same level as the motion axis of the workpiece to be tested; the precision measurement Abbe error control system includes A cross locator 1 and a laser transmitter 2, the cross locator 1 is provided with a cross positioning point, the cross positioning point corresponds to the position of the launch port of the laser transmitter 2, and a fixing seat is fixed below the laser transmitter 2 4. A horizontal indicator 3 is fixed on the top of the fixed seat 4, and a fine-tuning plate 5 is provided on the side of the fixed seat 4 facing away from the launch port of the laser transmitter 2, and ...

Embodiment 2

[0049] like Figure 1~4 As shown, on the basis of Embodiment 1, the fixed seat 4 specifically involved in this embodiment includes a seat body 41, and a number of limit rods 43 are fixed on both sides of the seat body 41, and the limit rods 43 are emitted by laser light. The device 2 is centrally symmetrical and evenly distributed, and the side of the base body 41 facing away from the laser emitter 2 is fixed with a semicircular plate 42, and the semicircular plate 42 and the limit rod 43 are embedded in the fine-tuning plate 5, and the knob 6 can be placed on the fine-tuning plate 5, adjust the lateral movement of the semicircular plate 42 and the limit rod 43; the fine-tuning plate 5 includes a plate body 51, and a moving block 54 is provided on the side of the plate body 51 close to the fixed seat 4, and the moving block 54 is embedded in the plate body 51 , and the upper surface of the moving block 54 is fixed with a limit plate 58, and the contact surface between the plat...

Embodiment 3

[0052] like Figure 1-7As shown, the difference between this embodiment and Embodiments 1 and 2 is that the horizontal adjustment seat 9 includes a horizontal top plate 91, the upper surface of the horizontal top plate 91 is fixed to the support seat 7, and a connecting seat is provided below the horizontal top plate 91. 93, between the connection seat 93 and the horizontal top plate 91, several telescopic adjustment rods 92 are evenly distributed in the circumferential direction, the upper end of the telescopic adjustment rod 92 is fixed with the horizontal top plate 91, and its lower end is fixed with the connection seat 93; the horizontal top plate 91 includes The top shell 911 is provided with a circular hydraulic chamber 913 inside the top shell 911, the hydraulic chamber 913 is filled with hydraulic oil 912, the hydraulic chamber 913 is fixed to the inner wall of the top shell 911, and there are several number And the pressure sensor 915 whose position corresponds to the...

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Abstract

The invention discloses an application method of a control system for precisely measuring abbe errors, which comprises a cross positioner and a laser emitter, wherein the cross positioner is providedwith a cross positioning point, the cross positioning point corresponds to an emitting port of the laser emitter in position, a fixed seat is fixed below the laser emitter, a fine adjustment plate isarranged on the side, away from an emission port of the laser emitter, of the fixed seat, a rotary knob is arranged on the upper surface of the fine adjustment plate, the fixed seat is fixed to the fine adjustment plate, the transverse position of the fixed seat can be adjusted through the rotary knob, a supporting base is arranged below the fixed seat, a gap is reserved between the supporting base and the fixed seat, a connecting rod is arranged between the supporting base and the fine adjustment plate, and a horizontal adjustment seat capable of adjusting the levelness of the fixed seat is fixed below the supporting base. By monitoring, regulating and controlling the abbe error influencing measurement, the influence of the axle distance is controlled within the reasonable range of the error by adopting auxiliary equipment, and the precision during precision measurement is improved.

Description

technical field [0001] The invention relates to the field of precision measurement precision auxiliary control, in particular to a method for using a precision measurement Abbe error control system. Background technique [0002] Precision and ultra-precision measurement technology is the basis and prerequisite for the development of the machinery industry and an important part of advanced manufacturing technology. From the perspective of production development history, the improvement of machining accuracy is always closely related to the development level of measurement technology. The use of micrometer measuring tools can make the processing accuracy reach 0.01mm; the use of micrometer comparator can make the processing accuracy reach 1μm; the modern laser interferometry method can make the processing accuracy reach 0.1μm. Materials, precision machining, precision measurement and control are the three pillars of modern precision engineering. Precision machining technology...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/02
CPCG01B11/00G01B11/02
Inventor 李凤英
Owner 常州巨特智能机械有限公司
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