Low-boiling-point electronic gas closed sampling system and sampling method

A sampling system, electronic gas technology, applied in the direction of sampling device, test sample preparation, etc., can solve the problems of high potential safety hazards, high sample bottle strength requirements, etc., to prevent pollution, facilitate remote control, and increase sampling volume Effect

Pending Publication Date: 2020-12-11
唐山三孚电子材料有限公司
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

Generally, gas-tight sampling samples are collected in a gaseous state. Due to the need for a large number of samples for testing, gas samples are generally liquefied by pressurization. Too high a pressure poses a great safety hazard, and the strength of the sample bottle is high.

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  • Low-boiling-point electronic gas closed sampling system and sampling method
  • Low-boiling-point electronic gas closed sampling system and sampling method
  • Low-boiling-point electronic gas closed sampling system and sampling method

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Embodiment Construction

[0042] In order to fully understand the purpose, features and effects of the present invention, the present invention will be described in detail through the following specific embodiments, but the present invention is not limited thereto.

[0043]see figure 1 and figure 2 , a kind of airtight sampling system of low boiling point electronic gas provided by the present invention, is made up of sampling bottle 1, purge replacement system 2 and cooling system 3 etc.; Cooling system 3 is made up of cooling cylinder 31 and circulating pump 32 etc. An interlayer communicated with the external pipeline is provided, and a refrigerant 33 is installed in the interlayer, and a circulation pump 32 is installed on the external pipeline. Preferably, the cooling cylinder 31 is a stainless steel jacket, the lower part of one side of the stainless steel jacket is provided with a liquid inlet pipeline connected with the interlayer, and the upper part of the other side of the stainless steel j...

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Abstract

The invention discloses a low-boiling-point electronic gas closed sampling system and a sampling method, and relates to the technical field of low-boiling-point gas sampling. The low-boiling-point electronic gas closed sampling system comprises a sampling bottle, a purging replacement system and a cooling system; the cooling system comprises a cooling cylinder; an interlayer communicated with an external pipeline is arranged on the cylinder wall of the cooling cylinder; a refrigerant is arranged in the interlayer; a circulating pump is arranged on the external pipeline; and the sampling bottleis arranged in the cooling cylinder; a gas inlet pipe and a gas outlet pipe are respectively arranged on two sides of the sampling bottle; the gas inlet pipe and the gas outlet pipe are connected with the purging replacement system through a three-way valve; the purging replacement system comprises a high-purity gas purging system, a sample gas introduction system, a purging gas detection system,a waste gas exhaust system and a vacuum system. According to the sampling system and the sampling method provided by the invention, closed sampling of different types of low-boiling-point electronicgases is realized, and pollution of air to a product is effectively prevented. According to the sampling system, the cooling cylinder is adopted to cool, liquefy and enrich low-boiling-point electronic gas, so that the sampling amount is increased.

Description

technical field [0001] The invention relates to the technical field of low-boiling point electronic gas sampling, in particular to a closed sampling system and sampling method for low-boiling point electronic gas. Background technique [0002] Electron gas refers to some chemical gases used in semiconductor extension, ion implantation, doping, corrosion, washing and other processes. Some of the electronic gases have a low boiling point, are highly corrosive, toxic, and react with certain components in the air, etc. A chemical reaction occurs during the sampling process, and it is easily contaminated. Leakage will pollute the environment and affect the health of personnel. Electron gases with low boiling points are gaseous at room temperature and must be sampled in a closed manner. Since a very small amount of contamination has a great impact on electronic grade materials, the sampling system must be kept clean and free from contamination. [0003] Airtight sampling is sui...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/24G01N1/34
CPCG01N1/24G01N1/34
Inventor 周晓咪王春英
Owner 唐山三孚电子材料有限公司
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