High-temperature oxygen-free tunnel furnace

Abstract

The invention discloses a high-temperature oxygen-free tunnel furnace. The high-temperature oxygen-free tunnel furnace comprises a furnace body and a furnace cover, wherein negative pressure cavity devices are arranged on the two sides of a heating section, so that the sealing performance of nitrogen in the furnace can be improved when a baked part enters and exits the heating section; the multiple heating sections of a heating area are independently controlled to ensure that the oxygen content in the heating sections are always kept at a stable level; and the baking effect of the baked part is more stable, the yield is higher, and the quality is better. Nitrogen enters the inner cavity of the furnace body through a nitrogen channel in the side wall of the furnace body, so that the sealingperformance in the furnace body can be further kept, and the nitrogen leakage is prevented; and further, the inner cavity of the furnace body comprises a plurality of cavities, so that the stabilityof the temperature of the inner cavity of the furnace body is guaranteed while the sealing performance is improved.

Description

technical field [0001] The invention relates to the technical field of baking equipment for electronic components, in particular to a high-temperature oxygen-free tunnel furnace. Background technique [0002] Some parts of electronic products need to be baked, and the oxygen content in the furnace needs to be controlled during the baking process. Some electronic products with high precision requirements need to control the oxygen content in the furnace below 20,000PPM during the baking process, which is very close to an oxygen-free environment. In the existing oven, when the parts to be baked enter the oven, it is easy to bring oxygen in the external space into the oven, thereby increasing the difficulty of controlling the amount of oxygen in the oven, and also reducing the quality of the baked product. reduce. The solution in the prior art is to fill the furnace with a large amount of nitrogen gas to dilute the oxygen content in the furnace after feeding the materials, wh...

AI Technical Summary

Problems solved by technology

In the existing oven, when the parts to be baked enter the oven, it is easy to bring oxygen in the external space into the oven, thereby increasing the difficulty of controlling the amount of oxygen in the oven, and also reducing the quality of the baked product. reduce

The solution in the prior art is to fill the furnace with a large amount of nitrogen gas to dilute the oxygen content in the furnace after feeding the materials, which will consume a lot of nitrogen gas and increase the production cost

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