Photomask dirt detection system and detection method for laser radar and laser radar

Abstract

The invention provides a photomask dirt detection system for a laser radar. The system comprises a transmitting device which is disposed on an optical machine rotor of the laser radar, is configured to transmit a detection light beam with a wavelength different from the wavelength of a light beam, emitted by the laser radar, for a detection target, and is used for detecting dirt on a photomask, areceiving device which is arranged on an optical machine rotor of the laser radar, and is configured to receive echoes generated after the detection light beam emitted by the transmitting device is reflected by dirt on the photomask and convert the echoes into a detection electric signal, and a processing unit which is coupled with the receiving device and is configured to identify the dirt condition of the photomask according to the detection electric signal. Through the embodiment of the invention, optical crosstalk can be effectively avoided when the photomask dirt is detected, meanwhile, 360-degree detection of the photomask can be realized, the detection range of the photomask dirt is enlarged, identification of different kinds of dirt is realized, and the detection efficiency is improved.

Description

Technical field[0001]The present invention relates to the technical field of laser radar, and in particular to a detection system, a detection method and a laser radar for a dirty mask of a laser radar.Background technique[0002]Lidar is an important sensor for autonomous driving. Existing Lidar usually does not add a dirt detection device to detect the mask. When an autonomous vehicle is driving, it will often encounter weather such as rain, snow, sand, etc. Dirt, scratches, sewage, and mud stains are formed on the lid of the lidar installed on the autonomous vehicle, which causes the lidar to fail to obtain environmental information around the autonomous vehicle, resulting in unsatisfactory detection results. Therefore, obtaining the dirt information of the lidar is beneficial to the normal detection of the lidar.[0003]The currently disclosed lidar dirt detection devices include: First, most of the detections are performed on the front-facing lidar reticle. The reticle dirt detecti...

AI Technical Summary

Problems solved by technology

[0003] The currently disclosed laser radar mask contamination detection devices include: first, most of them detect the mask of the forward laser radar. The mask contamination detection device is usually fixed and does not rotate, and only detects the front side of the mask. , so the mask contamination detection range is relatively limited; the second is to use the laser radar to detect the target beam to detect the mask

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