Unlock instant, AI-driven research and patent intelligence for your innovation.

Fluoride-free photoacid generator and preparation method thereof

A technology of photoacid generators and cations, which is applied in the preparation of carboxylic acid nitriles, photomechanical equipment, chemical instruments and methods, etc., can solve the problem of uneven distribution of PAG in photoresist films and low surface energy of fluorinated chains , uneven distribution and other problems, to achieve the effect of reducing impact, mild conditions and convenient operation

Pending Publication Date: 2020-12-22
华衍化学(上海)有限公司
View PDF0 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Ionic PAGs containing fluorinated alkylsulfonate groups have been extensively studied in the art. These PAGs contain hydrophobic fluorinated chains with low surface energies that can lead to PAGs in photoresist films. Uneven distribution in
The uneven distribution of PAG will have a serious impact on the image formed by the photoresist system

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Fluoride-free photoacid generator and preparation method thereof
  • Fluoride-free photoacid generator and preparation method thereof
  • Fluoride-free photoacid generator and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] The synthetic route of photoacid generator 1-4 is as follows:

[0033]

[0034] Preparation of Intermediate 1-2:

[0035] Dissolve phenylglyoxal hydrate 1-1 (5 g, 32.9 mmol) and malononitrile (2.2, 33.3 mmol) in isopropanol (50 mL), and add 2-bromomalononitrile (4.8 g, 33.1 mmol) with stirring ). Then stir for 30 minutes. Then the reaction solution was filtered to obtain a filter cake. The filter cake was washed and dried with isopropanol to obtain intermediate 1-2 (6.2 g, 25.2 mmol, molar yield 76.6%).

[0036] Preparation of Intermediates 1-3:

[0037] Under stirring condition, sodium acetate (2g, 24.4mmol) was dissolved in water (10mL), then added to a solution of intermediate 1-2 (6g, 24.4mmol) in acetonitrile (25mL), and reacted for 2 hours. The reaction solution was evaporated to dryness, the obtained solid was washed with dichloromethane, recrystallized with a mixed solution of isopropanol and water (1:1 by volume), filtered and dried to obtain intermedia...

Embodiment 2

[0041] The synthetic route of photoacid generator 2-4 is as follows:

[0042]

[0043] Preparation of Intermediate 2-2:

[0044] 1-Naphthylglyoxal hydrate 2-1 (5g, 24.7mmol) and malononitrile (1.7, 25.7mmol) were dissolved in isopropanol (50mL), and 2-bromomalononitrile (3.6g , 24.8 mmol). Then stir for 30 minutes. Then the reaction solution was filtered to obtain a filter cake. The filter cake was washed and dried with isopropanol to obtain intermediate 2-2 (5.7 g, 19.2 mmol, molar yield 77.8%).

[0045] Preparation of Intermediate 2-3:

[0046] Under stirring conditions, sodium acetate (1.6g, 19.5mmol) was dissolved in water (10mL), and then added to a solution of acetonitrile (25mL) containing intermediate 2-2 (5.7g, 19.2mmol), reaction 2 Hour. The reaction solution was evaporated to dryness, the obtained solid was washed with dichloromethane, recrystallized with a mixed solution of isopropanol and water (1:1 by volume), filtered and dried to obtain intermediate 2-...

Embodiment 3

[0050] The synthetic route of photoacid generator 3-4 is as follows:

[0051]

[0052] Preparation of intermediate 3-2:

[0053] Dissolve 3,4-dimethoxyphenylglyoxal hydrate 3-1 (5 g, 23.6 mmol) and malononitrile (1.6, 24.2 mmol) in isopropanol (50 mL), and add 2-bromo Malononitrile (3.5 g, 24.1 mmol). Then stir for 30 minutes. Then the reaction solution was filtered to obtain a filter cake. The filter cake was washed and dried with isopropanol to obtain intermediate 3-2 (5.5 g, 18.0 mmol, molar yield 76.2%).

[0054] Preparation of intermediate 3-3:

[0055] Under stirring condition, sodium acetate (1.5g, 18.3mmol) was dissolved in water (10mL), then was added to the solution containing intermediate 3-2 (5.5g, 18.0mmol) in acetonitrile (25mL), reaction 2 Hour. The reaction solution was evaporated to dryness, the obtained solid was washed with dichloromethane, recrystallized with a mixed solution of isopropanol and water (1:1 by volume), filtered and dried to obtain in...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a fluoride-free photoacid generator and a preparation method thereof. The fluoride-free photoacid generator has the following structural general formula, wherein R is aryl, andZ<+> is onium salt cation. The fluoride-free photoacid generator prepared by the invention has strong acidity and can be uniformly distributed in a photoresist system. The preparation conditions aremild, and the preparation method is simple.

Description

technical field [0001] The invention relates to the technical field of photoacid generators, in particular to a fluorine-free photoacid generator and a preparation method thereof. Background technique [0002] Photoacid generator (PAG) is one of the key components of chemically amplified photoresist. It is a kind of compound that can decompose and generate specific acid under the irradiation of specific light source or radiation. The acid produced can make The acid-sensitive resin decomposes or cross-links, which increases the contrast between the illuminated part and the non-illuminated part dissolved in the developer. [0003] Ionic PAGs containing fluorinated alkylsulfonate groups have been extensively studied in the art. These PAGs contain hydrophobic fluorinated chains with low surface energies that can lead to PAGs in photoresist films. The distribution in is uneven. The uneven distribution of PAG will have a serious impact on the image formed by the photoresist syst...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/004G03F7/039C07C255/17C07C381/12C07C253/30
CPCG03F7/004G03F7/039C07C255/17C07C381/12
Inventor 张猛王巧玲
Owner 华衍化学(上海)有限公司