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Structure for packaging two-dimensional material by using inorganic molecular crystal and packaging and de-packaging method thereof

An encapsulation method and technology of two-dimensional materials, applied in the field of nanomaterials, can solve the problems of complex operation, large residual pollution, and difficulty in achieving scale, and achieve the effect of simple processing technology, broad market prospects, and universality.

Pending Publication Date: 2021-01-05
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above methods have the disadvantages of changing the original chemical state of the two-dimensional material, poor stability, high residual pollution, complex operation, and difficulty in large-scale implementation.
At the same time, none of the above methods can effectively realize the decapsulation process to obtain the original pure two-dimensional materials after encapsulation.

Method used

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  • Structure for packaging two-dimensional material by using inorganic molecular crystal and packaging and de-packaging method thereof
  • Structure for packaging two-dimensional material by using inorganic molecular crystal and packaging and de-packaging method thereof
  • Structure for packaging two-dimensional material by using inorganic molecular crystal and packaging and de-packaging method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Example 1Sb2 o 3 Encapsulation and decapsulation on graphene surface as inorganic molecules

[0044] Sb 2 o 3 Encapsulation method of graphene as inorganic molecular encapsulation, such as figure 1 shown, including the following steps:

[0045] (1) Sb is coated by a high vacuum coating machine 2 o 3 Sublimation forms a gaseous inorganic molecular atmosphere, maintains a vacuum state during the reaction, and maintains a reaction pressure of 10 -6 Torr, the sublimation temperature is 300°C and the deposition temperature is 25°C.

[0046] (2) Deposit gaseous inorganic molecules on the surface of graphene to form a protective layer, and the graphene is mechanically stripped to SiO 2 / Si substrate, the deposition rate is controlled as The deposition time is set to 1000s, and the 20nm Sb 2 o 3 Graphene covered by a thin film.

[0047] Unpack the encapsulated graphene, such as figure 2 shown, will be Sb 2 o 3 Film-encapsulated graphene is placed in a horizontal...

Embodiment 2

[0048] Examples 2-4 have the same operation steps as Example 1, the main difference is that the two-dimensional materials are different, and Example 2 chooses MoS prepared by mechanical exfoliation 2 As the encapsulated two-dimensional material, embodiment 3 selects WSe prepared by mechanical exfoliation 2 As the encapsulated two-dimensional material, embodiment 4 selects TaS prepared by mechanical exfoliation 2 as an encapsulated two-dimensional material.

Embodiment 5

[0049] Embodiment 5-6 is identical with embodiment 1 operation steps, and main difference is that the inorganic molecular crystal is different, and wherein embodiment 5 is S 8 , embodiment 6 is P 4 Se 3 , embodiment 7 is GeI 4 . Examples 8-9 have the same operation steps as Example 1, the main difference is that the deposition rate and deposition thickness of thermal evaporation are different. The table of main parameters of Examples 1-9 of the present invention is shown in Table 1.

[0050] Table 1 embodiment parameter table

[0051]

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Abstract

The invention belongs to the field of nano materials, and particularly relates to a structure for packaging a two-dimensional material by using an inorganic molecular crystal and a packaging and de-packaging method thereof. The packaging method comprises the following steps: (1) sublimating inorganic molecular crystals to form a gaseous inorganic molecular atmosphere; and (2) depositing gaseous inorganic molecules on the surface of the two-dimensional material to form a protective layer. An inorganic molecular crystal material is used as a sublimation source, due to weak acting force between molecular crystals, sublimation can be conducted in a high-vacuum environment at a low temperature, the molecular crystals are deposited on the surface of a two-dimensional material to be packaged, anobtained packaging layer is connected with the two-dimensional material through Van der Waals' force, and the chemical state of the surface of the two-dimensional material is prevented from being changed; and the two-dimensional material packaging method can realize nondestructive packaging of the two-dimensional material, is easy to realize large-scale preparation and device integration, fully utilizes the performance of the inorganic molecular crystal, can realize packaging of different two-dimensional materials, has universality, and has a wide market prospect.

Description

technical field [0001] The invention belongs to the field of nanometer materials, and in particular relates to a structure for encapsulating two-dimensional materials using inorganic molecular crystals and encapsulation and decapsulation methods. Background technique [0002] Due to their unique physical and chemical properties such as ultra-high mobility, enhanced light interaction, and mechanical flexibility, two-dimensional materials are considered to be one of the most potential material bases for advanced optoelectronic devices, which has greatly attracted researchers. interest of. But when a certain dimension of the material is reduced to the atomic level, as the proportion of the surface increases significantly, its stability will be strongly affected by the chemical state of the surface and its interaction with the molecules in the environment. Therefore, many two-dimensional materials will degrade and fail in the atmospheric environment, and the current research on...

Claims

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Application Information

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IPC IPC(8): H01L21/02
CPCH01L21/02104H01L21/02518H01L21/02612
Inventor 翟天佑刘立昕刘开朗李会巧
Owner HUAZHONG UNIV OF SCI & TECH
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