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Terahertz spectrum measurement device, measurement method and application thereof

A measurement method and terahertz technology, applied in measurement devices, measuring electrical variables, using optical devices, etc., can solve problems such as increasing test time and inability to eliminate deviations

Active Publication Date: 2021-11-05
FUJIAN INST OF RES ON THE STRUCTURE OF MATTER CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method requires data acquisition with high frequency resolution (MHz order), which greatly increases the test time, and the measured transmission spectrum and refractive index cannot eliminate the deviation caused by the transmission coefficient.

Method used

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  • Terahertz spectrum measurement device, measurement method and application thereof
  • Terahertz spectrum measurement device, measurement method and application thereof
  • Terahertz spectrum measurement device, measurement method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0072] Schematic representation of measuring device and method of the present invention picture Such as Figure 4 As shown, the device includes: a difference frequency laser source 4003 with two frequency differences in the terahertz band, a terahertz transmitting antenna 4004 and a receiving antenna 4009, a bias voltage circuit 4002, terahertz parabolic mirrors 4005 and 4012, and signal output acquisition Circuit 4001. The terahertz parabolic mirror 4005 and the terahertz transmitting antenna 4004 form the transmitting end 4013 , and the terahertz parabolic mirror 4012 and the terahertz transmitting antenna 4009 form the detecting end 4014 . If a precision translation platform is selected to adjust the phase, the transmitting end 4013 and the detection end or 4014 are installed on a precise translation platform 4015, or the transmitting end 4013 or the detection end 4014 are respectively installed on two translation platforms 4015 ( picture (not shown in ), used to adjust t...

Embodiment 2

[0101] Schematic representation of measuring device and method of the present invention picture Such as Figure 4 As shown, the device includes: a difference frequency laser source 4003 with two frequency differences in the terahertz band, a terahertz transmitting antenna 4004 and a receiving antenna 4009, a bias voltage circuit 4002, terahertz parabolic mirrors 4005 and 4012, and signal output acquisition Circuit 4001. The terahertz parabolic mirror 4005 and the terahertz transmitting antenna 4004 form the transmitting end 4013 , and the terahertz parabolic mirror 4012 and the terahertz transmitting antenna 4009 form the detecting end 4014 . If the delay line (delay line) for adjusting the optical path is selected, it is located at the position of 4011 or 4010, the adjustment accuracy of the optical path reaches 1.5nm, and the total amount of adjustment is 1500nm. Sample 4006 is high-resistance silicon with a resistivity greater than 10kΩ·cm and a thickness of 2.16mm. The ...

Embodiment 3

[0122] Schematic representation of measuring device and method of the present invention picture Such as Figure 4 As shown, the device includes: a difference frequency laser source 4003 with two frequency differences in the terahertz band, a terahertz transmitting antenna 4004 and a receiving antenna 4009, a bias voltage circuit 4002, terahertz parabolic mirrors 4005 and 4012, and signal output acquisition Circuit 4001. The terahertz parabolic mirror 4005 and the terahertz transmitting antenna 4004 form the transmitting end 4013 , and the terahertz parabolic mirror 4012 and the terahertz transmitting antenna 4009 form the detecting end 4014 . The electro-optic modulator is selected, the adjustment accuracy of the phase is 0.004 radians, and the total amount of adjustment is 4 radians. Sample 4006 is silicon thickness 1mm.

[0123] The difference-frequency laser emitted by the difference-frequency laser source 4003 is combined and split into two beams by the beam combiner 40...

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Abstract

The invention belongs to the technical field of photoelectric correlation performance testing in the terahertz frequency range of materials, and specifically relates to a terahertz spectrum measurement method, a measurement device and applications thereof. The invention provides a measurement device for terahertz spectrum, which includes a difference frequency laser source with two frequency differences in the terahertz band, a terahertz transmitting antenna, a terahertz receiving antenna, a bias voltage circuit, a terahertz optical system, and a signal output acquisition circuit And phase or optical path adjustment system. The present invention also provides a method for measuring terahertz spectrum using the measuring device, and uses of the device and method.

Description

technical field [0001] The invention belongs to the technical field of photoelectric correlation performance testing in the terahertz frequency range of materials, and specifically relates to a terahertz spectrum measurement method, a measurement device and applications thereof. Background technique [0002] Tera Hertz (Tera Hertz, THz) is one of the fluctuating frequency units, also known as Terahertz, or Terahertz. Equal to 1,000,000,000,000Hz, usually used to represent the frequency of electromagnetic waves. In the past ten years, terahertz technology has made great progress. At present, terahertz technology not only continues to receive attention in basic scientific research, but also receives more and more attention in applications such as: dangerous biological and chemical agent detection, safety inspection, non-destructive testing, medical diagnosis and pharmaceuticals. The basic platform device engaged in the research of terahertz spectroscopy technology is the ter...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/3581G01N21/41G01B11/06G01R27/02
CPCG01B11/06G01N21/3581G01N21/41G01R27/02
Inventor 林琦林中晞朱振国钟杏丽苏辉
Owner FUJIAN INST OF RES ON THE STRUCTURE OF MATTER CHINESE ACAD OF SCI
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