MEMS piezoelectric resonator capable of adjusting frequency based on resonance body through hole

Abstract

The invention discloses an MEMS piezoelectric resonator capable of adjusting frequency based on a resonator through hole, which belongs to the technical field of electronic science and comprises: a resonator vibration block, wherein the resonator vibration block comprises a monocrystalline silicon layer, an aluminum nitride piezoelectric layer covering the surface of one side of the monocrystalline silicon layer, and a plurality of through holes which are located at the two ends of the resonance body vibration block and penetrate through the monocrystalline silicon layer and the aluminum nitride piezoelectric layer. and two supporting tables, wherein each supporting table is connected to the side face of the resonance body vibration block in the length direction through a supporting beam,and the supporting tables and the supporting beams are covered with aluminum nitride piezoelectric layers. The aluminum nitride piezoelectric layers on the resonator vibration block are electrically connected with the aluminum nitride piezoelectric layers on the corresponding supporting tables through the aluminum nitride piezoelectric layers on the supporting beam.

Description

technical field [0001] The invention belongs to radio-frequency micro-electromechanical systems, and in particular relates to a MEMS piezoelectric resonator for adjusting frequency based on a through-hole of a resonator. Background technique [0002] Resonators are one of the key devices in electronic equipment. At present, quartz crystal resonators are mainly used in electronic equipment. However, with the further requirements for high performance and miniaturization of electronic equipment, the large volume and high power of quartz crystal resonators Disadvantages such as power consumption and incompatibility with IC processes have become very prominent. MEMS piezoelectric resonator is a high-performance resonator device based on micro-mechanical technology and micro-mechanical vibration. It has the advantages of small size, low power consumption, and compatibility with IC technology, making it a good choice for the development of system miniaturization. Prospects. [00...

AI Technical Summary

Problems solved by technology

The rectangular structure can bring stable vibration, but its size parameters are only length and width, and the parameters in the frequency design of the resonator are relatively simple

In the manufacturing process of the resonator, the residual stress caused by process factors will cause the resonant frequency of the resonator to deviate, and the vibration block with a rectangular structure is difficult to perform rich parameter adjustments to compensate for the frequency deviation

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