Coating quality control method of gradient color coating machine

Abstract

The invention discloses a coating quality control method of a gradient color coating machine, the coating machine is provided with a film thickness meter, the film thickness meter comprises a crystaloscillator probe and a film thickness controller host, the crystal oscillator probe is fixed on the side surface of a workpiece rotating stand, the film thickness meter monitors the film thickness inreal time, and after each layer of coating, and if the film thickness meter detects that the film thickness is less than a preset film thickness, homochromatic sputtering continues to be conducted; and if the film thickness meter detects that the film thickness is within the range of the preset film thickness, the next layer of coating is conducted. According to the coating quality control methodof the gradient color coating machine, the film thickness is monitored more accurately, detection data are fed back in real time and corrected at any time, and the coating quality is improved.

Description

technical field [0001] The invention relates to the technical field of sputtering coating, in particular to a coating quality control method of a gradient color coating machine. Background technique [0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many others. [0003] Sputtering coating can be simply understood as bombarding the target with electrons or high-energy lasers, and sputtering the surface components in the form of atomic groups or ions, and finally depositing them on the surface of the substrate, going through the film-forming process, and finally forming a thin film. [0004] Magnetron sputtering is a type of physical vapor deposition (Physical Vapor Deposition, PVD). The general sputtering method can be used to prepare metals, semiconductors, insulators an...

AI Technical Summary

Problems solved by technology

[0005] The coating machine generally uses a film thickness meter to monitor the change of the film thickness during the coating process. The traditional method of fixing the probe above the furnace is the most convenient for installation, transmission and use, but the monitoring error is relatively large.

Later, a vertical coating machine appeared, using a vertical sputtering target for sputtering deposition, and unqualified products were picked out after monitoring, resulting in a longer process time

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