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A polishing machine capable of automatically replacing polishing discs

A technology for automatic replacement and polishing of discs, applied in the field of polishing machines, can solve problems such as reducing work efficiency and affecting polishing efficiency, and achieves the effects of good cooling, improved polishing efficiency and accurate polishing surface.

Active Publication Date: 2022-02-18
LIANCHENG KEKESI TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] When polishing a wafer or crystal rod, the crystal is generally polished by a polishing machine. During the polishing process, it is necessary to replace the polishing sheet with different polishing degrees. Affect polishing efficiency and reduce work efficiency

Method used

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  • A polishing machine capable of automatically replacing polishing discs
  • A polishing machine capable of automatically replacing polishing discs
  • A polishing machine capable of automatically replacing polishing discs

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0030] As an embodiment of the present invention, the trickle structure 8 includes a support plate 81, a fixed plate 82, a liquid storage tank 83, a diversion bag 84, a valve 85, a sliding buckle 86, a guide rail 87, a limit rod 88, a protective Cover 89, nozzle 810 and contraction spring 811, the bottom side of the support plate 81 is arranged with a guide rail 87, the guide rail 87 is equipped with a slide button 86, and the fixed plate 82 is welded on one end of the guide rail 87, The limiting rod 88 is welded on one side of the fixing plate 82, and one end of the limiting rod 88 is installed inside the sliding buckle 86, and the protective cover 89 is welded on the bottom side of the sliding buckle 86. The nozzles 810 are arranged on the top side of the inner wall of the protective cover 89, the liquid storage tank 83 is fixed on the top side of the support plate 81, the fluid storage tank 83 and the nozzles 810 are connected by a conduit, and a diversion bag is connected i...

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PUM

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Abstract

The invention discloses a polishing machine capable of automatically replacing a polishing disc, comprising a bracket, a fixed frame, a cylinder, a polishing motor, a slider, a slide rail, a replacement structure, a trickle structure and a positioning and clamping structure. The top side of the bracket is Slide rails are arranged, the top side of the slider is equipped with a polishing motor, the fixed frame is welded on the end of the slide rail, the cylinder is mounted on the fixed frame through bolts, and the action rod of the cylinder The end is welded on the polishing motor, and the replacement structure is matched and installed on the rotating shaft of the polishing motor. Through the operation of the swing motor, the swing gear is driven to rotate. With the cooperation of the matching gear, the matching shaft can be driven to rotate, and the mounting frame is coordinated to rotate. Multiple polishing sheets can be replaced together. After the replacement, the polishing motor drives the installation frame to rotate to realize the polishing and polishing of the crystal. The polishing sheet can be replaced in a cycle, which can greatly improve the polishing efficiency and ensure the accuracy of the polished surface.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a polishing machine capable of automatically replacing a polishing disk. Background technique [0002] Semiconductor materials are the cornerstone of the modern semiconductor industry and microelectronics industry. From a physical point of view, it refers to a class of materials whose conductivity is between conductors and insulators. [0003] There are many kinds of semiconductor materials, which can be roughly divided into three types: inorganic semiconductor crystals, organic semiconductor materials and amorphous semiconductors. At present, amorphous semiconductor materials have great application prospects in solar cells. But overall, inorganic semiconductor crystals still dominate semiconductor materials; [0004] When polishing a wafer or crystal rod, the crystal is generally polished by a polishing machine. During the polishing process, it is necessary to replace ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B29/04B24B27/00B24B41/04B24B47/22B24B57/02B24B55/02
CPCB24B29/04B24B27/0076B24B41/04B24B47/22B24B57/02B24B55/02
Inventor 李方许星杰王明升李秉东辛珊
Owner LIANCHENG KEKESI TECH CO LTD
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