A kind of infrared temperature measuring device and temperature measuring control method of cigs co-evaporation method

Abstract

The invention relates to an infrared temperature measuring device of a CIGS co-steaming method and a temperature measurement control method thereof, which solves the problem of the need for temperature measurement of a stainless steel coil base of the CIGS co-steaming method. The upper part of the vacuum chamber of the device is a stainless steel coil as the deposition substrate. A heater is arranged above the stainless steel coil, and a temperature measuring mechanism is installed below the stainless steel coil. The temperature measuring mechanism includes a sealed cover, and the upper surface of the cover is a high-transparency glass plate. There is a probe set upwards in the cover body, a heating plate is attached to the high-transparency glass plate, a wiring tube is set between the cover body and the lower wall of the vacuum chamber, and an optical fiber connected to the probe is installed in the routing tube. The upper plate is provided with a water-cooled coil. The present invention can use the probe type infrared temperature measuring probe to measure the temperature of the stainless steel coil in the vacuum chamber at a near point and use the heating plate to heat the cover to avoid blocking the temperature measuring optical path by selenium vapor deposition, so that the device can last Stable temperature monitoring of the stainless steel coil deposition section to ensure the stable operation of the temperature control system.

Description

technical field [0001] The invention belongs to the field of solar cells, and relates to a CIGS co-evaporation method temperature control device for flexible solar cells, in particular to an infrared temperature measurement device and a temperature measurement control method for the CIGS co-evaporation method. Background technique [0002] Flexible solar cell sheet is to form solar photovoltaic material coating on flexible and rollable substrate. Copper indium gallium selenide (CIGS) thin-film battery is a solar photovoltaic material with high mass-to-power ratio and good stability, and is generally considered to be the most promising flexible solar battery material. The multi-element co-evaporation method is the most widely used CIGS coating method. The coating is completed in a vacuum environment, and copper, indium, gallium, and selenium are co-evaporated to form a polycrystalline coating on the surface of the substrate. Vapor coating is completed in a vacuum, high tempe...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the vacuum chamber of the CIGS co-evaporation method is high temperature, low pressure and filled with highly corrosive steam, and the existing temperature sensors cannot directly meet the needs of the substrate temperature measurement of the CIGS co-evaporation method. It also solves the problem of deposition of high-temperature steam on the temperature sensor probe in the vacuum chamber, and provides an infrared temperature measurement device and its temperature measurement control method of the CIGS co-evaporation method, which can protect the probe extending into the vacuum chamber, and at temperature The sensor probe is heated and kept warm to avoid high temperature vapor deposition

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