Piezoelectric electro-hydraulic servo valve and control method thereof
An electro-hydraulic servo valve, piezoelectric technology, applied in servo motor components, valve details, valve devices, etc., can solve the problem of reducing the stability and reliability of servo valves, limited torque motor output capacity, and torque motor output capacity bottlenecks, etc. problems, to achieve the effect of accurately controlling the liquid resistance characteristics, realizing precise control and large output capacity
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[0034] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0035] Such as figure 1 with figure 2 As shown, the present invention provides a piezoelectric electro-hydraulic servo valve and its control method, including: a piezoelectric actuator, a movable nozzle device, a controller, a return spring, an LVDT displacement detection device, and a fixed baffle. The piezoelectric actuator and movable nozzle device are used to output displacement according to the control signal, control the pressure difference of the pre-stage of the servo valve, and generate the f...
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