Liquid crystal display panel, thin film transistor and preparation method of thin film transistor
A thin-film transistor, one-sided technology, which is applied in the photolithography process of transistors and pattern surfaces, and semiconductor/solid-state device manufacturing, etc., can solve problems such as abnormal pictures, reduced reliability of liquid crystal display panels, and increased off-state current of thin-film transistors. , to achieve the effect of improving reliability, reducing the probability of abnormal picture, and reducing the size of smear
Active Publication Date: 2021-04-09
BEIHAI HKC OPTOELECTRONICS TECH CO LTD +1
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Problems solved by technology
[0003]
In view of this, the embodiment of the present application provides a liquid crystal display panel, a thin film transistor and a manufacturing method thereof, so as to solve the problem that the contact layer below the source and drain layers will form amorphous silicon in the channel region during the manufacturing process of the thin film transistor. Pigtails lead to an increase in the off-state current of the thin film transistor, which leads to a decrease in the reliability of the liquid crystal display panel based on the thin film transistor, and is prone to screen abnormalities
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[0035] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present application with unnecessary detail.
[0036] It should also be understood that the term "and / or" used in the description of the present application and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.
[0037] In addition, in the description of the specification and appended claims of the present application, the te...
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Abstract
The invention is applicable to the technical field of display, and provides a liquid crystal display panel, a thin film transistor and a preparation method thereof. The preparation method comprises the steps that in the first photomask manufacturing procedure, a source-drain electrode layer comprising a first nitride conducting layer, a metal layer and a second nitride conducting layer and a photoresist layer are prepared; and / or, in the second photomask manufacturing process, the duration of the second wet etching is shortened to 85-95 S; and / or, in the second photomask process, the duration of the second dry etching is prolonged to 40S-50S, so that the trailing size of a contact layer can be effectively reduced, the channel length between a gate layer and a drain-source electrode layer and the length of the channel region are increased, the off-state current of the thin film transistor is normal, the reliability of the liquid crystal display panel based on the thin film transistor is improved, and the probability of picture abnormality is reduced.
Description
technical field [0001] The present application belongs to the field of display technology, and in particular relates to a liquid crystal display panel, a thin film transistor and a preparation method thereof. Background technique [0002] With the continuous development of display technology, various types of display panels emerge in an endless stream, bringing great convenience to people's daily production and life. A liquid crystal display panel is a display panel that is widely used at present, and usually uses thin film transistors (Thin Film Transistor, TFT) to drive liquid crystal pixels. During the fabrication of thin film transistors, the contact layer below the source and drain layers will form amorphous silicon (a-Si) pigtails in the channel region, resulting in an increase in the off-state current (Ioff) of the thin film transistor, resulting in The reliability (Reliability, RA) of the liquid crystal display panel implemented by the thin film transistor is lowere...
Claims
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IPC IPC(8): H01L29/786H01L21/336G02F1/1368G02F1/1362G03F1/80
CPCH01L29/78669H01L29/66765G02F1/1362G02F1/1368G03F1/80
Inventor 夏玉明卓恩宗康报虹
Owner BEIHAI HKC OPTOELECTRONICS TECH CO LTD