Three-dimensional integrated structure and manufacturing method thereof

Abstract

The invention provides a three-dimensional integrated structure, which comprises a shell, a first nano capacitor, a second nano capacitor, and a conductive assembly, wherein the first nano capacitor and the second nano capacitor are arranged up and down, and the shell is provided with two first through holes which are arranged at an interval; and the conductive assembly enables the first bottom metal electrode layer and the second bottom metal electrode layer to be electrically connected through the two first through holes, and enables the first top metal electrode layer and the second top metal electrode layer to be electrically connected. The first bottom metal electrode layer and the second bottom metal electrode layer are electrically connected through the two first through holes by the conductive assembly, so that the first top metal electrode layer and the second top metal electrode layer are electrically connected, and parallel arrangement of the first nano capacitor and the second nano capacitor is realized; the capacitor density is increased, and the overall performance of the capacitor is improved. In addition, the invention further provides a manufacturing method of the three-dimensional integrated structure.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a three-dimensional integrated structure and a manufacturing method thereof. Background technique [0002] At present, for portable electronic devices, batteries are still the main energy supply components. Although battery technology is constantly developing, a compromise still needs to be made between the capacity, volume and weight of the battery. Accordingly, some alternative power supply components with large capacity, light weight, and small size have been researched and developed, such as micro fuel cells, plastic solar cells, and energy harvesting systems. [0003] In all cases mentioned above, an energy buffer system is usually required to maintain a continuous and steady energy output. For example, fuel cell systems are generally believed to have slower start-up times and lower kinetic energy. Therefore, a hybrid system in which the fuel cell provides the basic...

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Problems solved by technology

However, it does not solve the problem of increasing the capacitance density while reducing the surface area occupied by the capacitor, and improving the overall performance of the capacitor.

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