Method and device for detecting defects on the outer surface of a differential confocal fixed-plane interference target pellet

Abstract

The invention relates to a method and a device for detecting defects on the outer surface of a differential confocal surface-fixed interference target pellet, and belongs to the technical field of optical imaging and detection. This method uses the zero-crossing point of the differential confocal light intensity response curve to precisely locate the axial position of the target (measured surface) and camera (detection surface), so as to achieve accurate and autofocus imaging of the outer surface; A short coherent light source and a spherical reference mirror generate the outer surface zero interferogram; then, the phase shifting interferometry technique is used to measure the outer surface defect distribution from the outer surface zero interferogram. The present invention utilizes the precise positioning characteristics of the differential confocal technology to provide a more accurate adjustment and judgment basis for the axial position adjustment of the target capsule and the camera, thereby effectively improving the focus and detection accuracy of the outer surface of the traditional interference microscopy method and efficiency, and provide the necessary technical support for automated detection. The invention provides a new technical approach for the high-precision, high-efficiency and automatic detection of the outer surface defects of a large number of target pills.

Description

technical field [0001] The invention belongs to the technical field of optical imaging and detection, and is used for the precise detection of outer surface defects of target pills, which is the most core key device in inertial confinement fusion (ICF). Background technique [0002] Inertial confinement fusion (ICF) is not only an ideal technology for human beings to obtain clean energy in the future, but also provides strong support for the development of cutting-edge scientific research in condensed matter physics and astrophysics under extreme high temperature and high pressure conditions. At present, China, the United States, France, Russia, Japan and other countries have vigorously carried out ICF-related research. The ICF precisely focuses multiple high-energy lasers on a tiny hollow spherical target filled with DT fuel, and the shell of the target implodes instantly and uniformly compresses the DT fuel inside to a high-temperature and high-pressure state, thereby achi...

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Problems solved by technology

[0008] The purpose of the present invention is to solve the problem that the existing method is difficult to realize the high-precision and large-scale automatic detection of the defects on the outer surface of the target capsule, and proposes to use the differential confocal positioning technology to realize the accurate and fast automatic positioning of the target capsule and the camera in the interference optical path, and then effectively Guarantee the focusing accuracy and defect measurement accuracy of the outer surface, and provide the key technical basis and guarantee for rapid automatic inspection

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