Virtual synthesis wave long-chain absolute distance interfero metering method and apparatus for realizing the same

A technology of synthesizing wavelength and interferometric measurement, which is applied in the field of absolute distance measurement and can solve problems such as system complexity

Inactive Publication Date: 2003-11-05
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] 1. Due to the use of multi-wavelength lasers or multiple single-wavelength lasers as light sources, the wavelength interval is a fixed value, so only some fixed synthetic wavelengths can be obtained. If the number of lasers is increased in order to obtain a suitable synthetic wavelength, it will make the system become quite complicated
[0004] 2. Another disadvantage of the fixed synthetic wavelength is that if the synthetic wavelength cannot be obtained long enough, it is necessary to increase the rough measurement method of the distance to be measured to uniquely determine the integer order of the synthetic wave interference signal

Method used

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  • Virtual synthesis wave long-chain absolute distance interfero metering method and apparatus for realizing the same
  • Virtual synthesis wave long-chain absolute distance interfero metering method and apparatus for realizing the same
  • Virtual synthesis wave long-chain absolute distance interfero metering method and apparatus for realizing the same

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Embodiment 1

[0041] Embodiment 1: Measuring the outer dimensions of the workpiece based on the size of the gauge block

[0042] The device of this embodiment is as figure 2 As shown in the figure, the light source L is a tunable external cavity semiconductor laser, and its emission wavelength ranges from 632nm to 638nm, M 21 , M 22 It is a glass plate coated with anti-reflection coating on one side, and its uncoated side is close to the gauge block J 1 end face. Workpiece to be tested J 2 The end face M 23 , M 24 respectively with M 21 , M 22 parallel. Piezoelectric ceramic driving gauge block J 1 moving at a constant velocity υ. The light emitted by the laser L passes through the beam splitter BS 1 Divided into two beams, the reflected light is incident into the wavelength meter W. The transmitted light passes through the beam splitter BS 2 It is divided into two beams, one beam passes through the mirror M 5 Incident to M 21 The non-coated surface and the workpiece to be t...

Embodiment 2

[0049] Embodiment 2: The internal dimension of the workpiece is measured based on the size of the ceramic gauge block. The workpiece to be measured is a glass tube for refractive index measurement, and the size to be measured is the distance between the windows at both ends of the glass tube. The local composition of this embodiment is as image 3 Shown, J 2 Is a standard ceramic gauge block, the glass tube J 1 The window mirrors at both ends are M 31 , M 32 , the window glass M at both ends of the glass tube 31 , M 32 Respectively with the end face M of the ceramic gauge block 33 , M 34 parallel. These two windows are also coated with anti-reflection coating on one side, and the inner dimension D between the two windows is x is the size to be measured. The rest of its measuring device and measuring method are the same as in Example 1, and will not be repeated.

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Abstract

The invention belongs to the technical field of absolute distance measurement, and relates to a virtual synthetic wavelength chain absolute distance interferometric method and a realization device. Two double-beam interferometers used in a straight line are modulated by piezoelectric ceramics and tunable lasers are used to measure the wavelength value and the phase of the single-wavelength interference signal while the wavelength is tuned, and calculate the virtual synthetic wave interference fringes. decimal order. A series of virtual synthetic wavelength chains from large to small are obtained by tuning the laser, and the rough and fine measurement of the absolute distance is completed. The invention has the characteristics of high measurement accuracy of fractional fringes and can complete the process from rough measurement to precise measurement at one time, is suitable for internal and external dimension measurement, and can be used for making micro-sized measuring heads.

Description

technical field [0001] The invention belongs to the technical field of absolute distance measurement, and in particular relates to the improvement of a synthetic wavelength absolute distance interferometric method. Background technique [0002] The absolute distance measurement method without guide rail has a broad application prospect in precision measurement. Compared with the relative measurement method with guide rail, it has obvious advantages. Even wrong. One of the most commonly used absolute distance interferometry methods is the synthetic wavelength method, which uses the beat waves (ie synthetic waves) of two light waves to form interference signals in the interference system. For a given distance to be measured, when the beat wave wavelength ( That is, when the synthesized wavelength) is long enough, the integer order of the synthesized wave interference signal can be uniquely determined, so the distance to be measured can be accurately measured only by measuring...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/02
Inventor 殷纯永晁志霞林德教徐毅
Owner TSINGHUA UNIV
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