Mask manufacturing device and manufacturing method

Abstract

The invention discloses a mask manufacturing device. The mask manufacturing device comprises a net stretching module used for stretching a mask and conveying the mask to a mask frame, a mask detection module used for detecting the position information of a mask strip on the mask frame, a mask fixing module used for fixing the mask on the mask frame and a first displacement measurement module used for measuring the position information of the net stretching module and the mask fixing module. The position information of the mask detection module is accurately determined through the first displacement measurement module, then the actual position of the mask can be more accurately obtained, and therefore the mask can be more accurately moved to the preset position by adjusting stretching and displacement of the net stretching module, and the placement position accuracy of the mask relative to the mask frame is improved; and the position information of the mask fixing module is accurately determined through the first displacement measurement module, the fixing accuracy of the mask fixing module to the mask and the mask frame is improved, and therefore the manufacturing accuracy of a metal mask plate is improved.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a mask manufacturing device and a manufacturing method. Background technique [0002] At present, the evaporation method used on all OLED mass production machines is horizontal evaporation, and a mask must be used in the OLED evaporation process. The method of manufacturing the mask plate can be roughly divided into two categories, which are respectively stretching the net in strips and stretching the whole net together. Strip-stretching is to apply a certain tension to the mask strips, and then install the mask strips on the mask frame one by one to form a mask plate. [0003] A high-precision metal mask (Fine Metal Mask, FMM) has been widely used due to its high meshing precision. In the existing FMM manufacturing equipment, due to the limitation of equipment structure and measurement means, the manufacturing accuracy of FMM stays at the level above 2μm-3μm, and it ...

AI Technical Summary

Problems solved by technology

In the existing FMM production equipment, due to the limitations of the equipment structure and measurement methods, the production accuracy of FMM stays at the level of 2μm-3μm or more, and it is difficult to further improve the production accuracy of the metal mask

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